산화막 중간층에 의한 수직자기기록층의 입자크기 미세화
Fine Granulation of Recording Layer in Perpendicular Magnetic Recording Media Using Oxide-interlayer
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Abstract
Seedlayers with low surface energy which increases the density of nucleation sites in the initial growth region of the recording layer deposited on them was studied to reduce grain size in recording layer. The seedlayer with low surface energy was so effective to attain finer grain in magnetic upper-layers. The Ni-Fe-O intermediate layer with low surface energy was found to be effective in reduction of grain size as well as magnetic cluster size of Co-Cr-Ta-Pt recording layer. Furthermore, the reduction of grain size in Co-Cr-Ta-Pt recording layer on Ni-Fe-O intermediate layer with low surface energy led to decrease the noise level in the high recording density region.
참고문헌 (3)
- K. H. Kim, "Applied Surface Science", 410, pp.169~170 (2001)
- 김경환, "Co-Cr(-Ta)", Si, pp.2002, 15(3)[DOI]
- 김경환, "대향타겟스퍼터링법에 의한 FBAR용 AZO 박막의 제작", pp.422~ (2004)
