Sulfate 용액을 이용하여 전기도금 한 FCCL용 Cu 필름의 특성에 미치는 전류밀도와 pH의 영향
Effect of Current Density and Solution pH on Properties of Electrodeposited Cu Thin Films from Sulfate Baths for FCCL Applications
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Nanocrystalline Cu thin films for FCCL were electrodeposited from sulfate baths to investigate systematically the influences of current density, solution pH on current efficiency, residual stress, surface morphology, and microstructure of thin Cu films. Current efficiencies were measured to be approximately 100%, irrespective of the applied current density and solution pH. But these influenced residual stress, surface morphology, XRD pattern, and grain size of electrodeposited Cu thin film. The residual stress decreased with decreasing the surface roughness, but increased with increasing the fcc(111) peak strength of XRD patterns.
Abstract
Nanocrystalline Cu thin films for FCCL were electrodeposited from sulfate baths to investigate systematically the influences of current density, solution pH on current efficiency, residual stress, surface morphology, and microstructure of thin Cu films. Current efficiencies were measured to be approximately 100%, irrespective of the applied current density and solution pH. But these influenced residual stress, surface morphology, XRD pattern, and grain size of electrodeposited Cu thin film. The residual stress decreased with decreasing the surface roughness, but increased with increasing the fcc(111) peak strength of XRD patterns.
참고문헌 (14)
- D. H. Lee, , Polymer, 11, pp.206~ (1987)
- D.-Y. Park, , J. Electrochem. Soc., 153(12), pp.C814~ (2006)
- M. Schlesinger, "Modern Electroplating", pp.63~103 (2000), John Wiley & Sons, Inc.
- V. A. Lamb, , J. Electrochem. Soc., 117, pp.291C~ (1970)
- V. A. Lamb, , J. Electrochem. Soc., 117, pp.341C~ (1970)
- V. A. Lamb, , J. Electrochem. Soc., 117, pp.381C~ (1970)
- V. DeNora, , Met. Ital., 31, pp.607~ (1939)
- V. DeNora, , Chem. Abstr., 35, pp.5797~ (1940)
- L. L. Shreir, , J. Electrochem. Soc., 99, pp.64~ (1952)
- L. L. Shreir, , J. Electrochem. Soc., 99, pp.450~ (1952)
- A. Butts, , Trans. Electrochem. Soc., 79, pp.163~ (1941)
- D.-Y. Park, , Electrochim. Acta, 47, pp.2893~ (2002)
- J. W. Cuthbertson, , Trans. Electrochem. Soc., 77, pp.157~ (1940)
- W. A. Wood, , Proc. Phys. Soc., 43, pp.138~ (1931)