유도결합 플라즈마 시스템의 수치 모델링에서 가스 분배 특성 해석
Characterization of Gas Distribution Effect in Inductively Coupled Plasma System
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초록
We have developed a 2D axi-symmetric numerical model for an inductively coupled plasma system in order to analyze gas mixing effect through a narrow gap shower head. For frictional flow, holes of 0.5 mm diameter and 2 mm length are approximately modeled in 2D. Gas velocity distribution 10 mm below the shower head showed 2 times difference between the center and the edge at 10 mTorr. At 10 mm above the wafer, it was increased to 6 times difference due to the pumping duct effect. The model with a 5 mm height buffer region of a shower head showed reasonable behavior of Ar discharge. The density of Ar metastable showed additional peak inside the buffer region around the edge holes.
Abstract
We have developed a 2D axi-symmetric numerical model for an inductively coupled plasma system in order to analyze gas mixing effect through a narrow gap shower head. For frictional flow, holes of 0.5 mm diameter and 2 mm length are approximately modeled in 2D. Gas velocity distribution 10 mm below the shower head showed 2 times difference between the center and the edge at 10 mTorr. At 10 mm above the wafer, it was increased to 6 times difference due to the pumping duct effect. The model with a 5 mm height buffer region of a shower head showed reasonable behavior of Ar discharge. The density of Ar metastable showed additional peak inside the buffer region around the edge holes.
참고문헌 (7)
- E. Meeks, , Thin Solid Films, 365, pp.334~ (2000)
- 권득철, "A numerical study of the effect of gas injection position in an inductively coupled plasma discharge", Current Applied Physics, 9(3), pp.546~550 (2009), 한국물리학회
- 이원기, "평판형 유도결합 플라즈마 장치의 SiH4", H2 방전에 대한 공간 평균 전산모사, 2009, pp.18(6), 426~434[DOI]
- D. Bose, , J. Elec. Soc, 146, pp.2705~ (1999)
- 주정훈, "CFD를 이용한 내장형 안테나 유도 결합 플라즈마 시스템 모델링", 한국진공학회지, 18(3), pp.164~175 (2009), 한국진공학회
- E. Keiter, , IEEE Trans Plasma Sci, 27(2), pp.62~ (1999)
- E. Meeks, , J. Vac. Sci. A, 16, pp.544~ (1998)