본문 바로가기
KERD
논문KCI 등재

Via-Filling 공정시 발생하는 첨가제 분해에 관한 연구

A study on the Additive Decomposition Generated during the Via-Filling Process

1

조회

0

다운로드

4

인용

0

참고문헌

키워드

주제분류기계공학

초록

The defect like the void or seam is frequently generated in the PCB (Printed Circuit Board) Via-Filling plating inside via hole. The organic additives including the accelerating agent, inhibitor, leveler, and etc. are needed for the copper Via-Filling plating without this defect for the plating bath. However, the decomposition of the organic additive reduces the lifetime of the plating bath during the plating process, or it becomes the factor reducing the reliability of the Via-Filling. In this paper, the interaction of each organic additives and the decomposition of additive were discussed. As to the accelerating agent, the bis (3-sulfopropyl)disulfide (SPS) and leveler the Janus Green B (JGB) and inhibitor used the polyethlylene glycol 8000 (PEG). The research on the interaction of the organic additives and decomposition implemented in the galvanostat method. The additive decomposition time was confirmed in the plating process from 0 Ah/l (AmpereHour/liter) to 100 Ah/l with the potential change

Abstract

The defect like the void or seam is frequently generated in the PCB (Printed Circuit Board) Via-Filling plating inside via hole. The organic additives including the accelerating agent, inhibitor, leveler, and etc. are needed for the copper Via-Filling plating without this defect for the plating bath. However, the decomposition of the organic additive reduces the lifetime of the plating bath during the plating process, or it becomes the factor reducing the reliability of the Via-Filling. In this paper, the interaction of each organic additives and the decomposition of additive were discussed. As to the accelerating agent, the bis (3-sulfopropyl)disulfide (SPS) and leveler the Janus Green B (JGB) and inhibitor used the polyethlylene glycol 8000 (PEG). The research on the interaction of the organic additives and decomposition implemented in the galvanostat method. The additive decomposition time was confirmed in the plating process from 0 Ah/l (AmpereHour/liter) to 100 Ah/l with the potential change

참고문헌 (6)

  1. S.-E. Lee, , Electrochem. Soc, 14, pp.3~ (2007)
  2. 홍성철, "3차원 Si칩 실장을 위한 효과적인 Cu 충전 방법", 대한금속·재료학회지, 50(2), pp.152~158 (2012), 대한금속·재료학회
  3. Y.-B. Li, , Appl. Surf. Sci, 255, pp.3977~ (2009)
  4. W. Wang, , Appl. Surf. Sci, 255, pp.4389~ (2009)
  5. 이주열, "유기물 첨가제가 마이크로 패턴 구리 전주 도금에 미치는 영향 연구", 한국표면공학회지, 43(1), pp.1~6 (2010), 한국표면공학회
  6. W.-P. Dow, , Electrochimica Acta, 53, pp.3610~ (2008)

관련 논문AI추천

이 간행물의 다른 논문 (6건)