기능성 고분자막을 이용한 반도체 공정 세정액의 분리정제특성(1)
Separation Purification Characteristics of Rinsing Solution in Semiconductor Process usingHigh Performance Polymer Membranes (Ⅰ)
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Abstract
this work, a practical separation performance was investigated on aqueous alcohol solutions, especially for iso-propyl alcohol (IPA), which is usually used during the semi- conductor rinsing process. The removal of various substances from waste aqueous IPA solutions was carried out by microfiltration with 0.1～1㎛ pore size of mean diameter as a pre-filter.Permeability and molecular weight cut-off of the functional polysulfone(PSf) ultrafiltration membrane to purify waste aqueous IPA solutions were measured through the ultrafiltration test. The solute rejection of PSf membrane had 92% in 1,000ppm aqueous PEG solution with PEG molecular weight 10,000, the molecular weight cut-off had 10,000.The IPA concentration on the CMPA-K+ membrane performance using pervaporation module system could be increased from 95.04 wt% to more than 98.50wt% in about 9hr at operation temperature of 70℃ using the pervaporation module system.
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