기능성 고분자막을 이용한 반도체 공정세정액의 분리정제특성(Ⅱ)
Separation Purification Characteristics of Rinsing Solution in Semiconductor Process usingHigh Performance Polymer Membranes(Ⅱ)
2
조회
0
다운로드
0
인용
0
참고문헌
초록
Abstract
combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040㎠), and simple ultrafiltration unit as a refiner. Ultrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution.In addition, the flux of CMPA-K+ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30days). And the standard deviation(σ) was 0.152 and then the coefficient of variation(CV%)was 10.82The IPA concentration on the membrane performance using pervaporation module system could be increased from 89.85wt% to more than 99.90wt% in about 8hr at operation temperature of 70℃ using the pervaporation module system.Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse from industrial electronic components cleaning process.
참고문헌 (12)
- "Control of organic susbstances in water and waste water" (1987)
- "Handbook of Industrial membrane Technology" (1990)
- "Membrane separation", pp.99~101 (1996), 自由 academy
- "Ultrafiltration and microfiltration handbook", pp.146~147 (1998)
- "Recent developments in separation science" (1972), CRC Press
- "In advances in bio-chemical engineering and biotechnology" (1983), Springerverlag
- "Pervaporation dehydration of isopropanol with chitosan membranes", 124, pp.53~62 (1997)
- "Dehydration of ethanol and isopropanol using tubular type celluloseacetate membrane with ceramic support in perva poration process", 123, pp.27~33 (1997)
- "Dehydration of alcohol solutions through crosslinked chitosan composite membranes - I. Preparation of chemically corsslinked chitosan composite membranes and ethanol dehydration The Membrane Society of Korea", pp.37~43 (1996)
- "polyacrylonitrile composite membranes for the dehydration of acetic acid", pp.57~70 (1993)
- "Polyvinyl alcohol-polyacrylamide interpenetrating polymer network membranes and their pervaporation characteristics for ethanol-water mixtures", 106, pp.167~182 (1995)
- "Separation Purification Characteristics of Rinsing Solution in Semiconductor Process using High Performance Polymer Membranes" (2003), in press