패턴이 있는 유리기층 위 러빙된 Polyimide의 광학 이방성 미세변화 정밀 측정
Precise Measurement of Optical Anisotropy of Rubbed Polyimide on Patterned Glass and its Nanoscale Variation
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초록
편광법을 사용하여 패턴이 있는 LCD 유리기층위에 놓여 있는 러빙된 PI(polyimide)의 광학이방성을 분석하였다. 투과형 편광 계를 사용하여 0.4 nm 이하의 극히 작은 위상지연의 크기와 광축의 방향을 정밀하게 측정하였다. 온도에 따르는 광학이방성의 미세변화를 위상지연의 크기 및 광축 방향의 변화곡선으로 나타내고 간단한 광학모델을 사용하여 설명하였다.
Abstract
The optical anisotropy of rubbed PI(polyimide) film on patterned LCD glass substrate is analyzed using polarimetry. The direction of the optic axis and the magnitude of the very small retardation (~ 0.4 nm or less) is precisely measured by using a transmission ellipsometer. The variation of the optical anisotropy is presented as the curve of the optic axis versus the magnitude of the phase retardation and it is explained by using a simple optical model.
참고문헌 (9)
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