단축이방성 배향막이 코팅되어 있는 다층박막시료의 타원식
Ellipsometric Expressions of Multilayered Substrate Coated with a Uniaxially Anisotropic Alignment Layer
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초록
다층박막이 있는 기층에 단축이방성 배향막이 코팅되어 있을 때 비스듬히 입사한 빛의 유효반사계수 표현들을 유도하였다. 유효반사계수들과 타원상수들을 다층박막의 미지상수들은 물론 단축이방성 배향막의 광학이방성의 크기와 광축의 방향 그리고 배향막의 두께로 표현하였다. 이를 바탕으로 배향막의 정상굴절률과 이상굴절률, 배향된 두께 그리고 광축의 방위각과 기울임각 을 다층박막의 두께나 조성비 등과 함께 타원법이 가지고 있는 높은 수준의 측정 정밀도를 유지하며 기존의 모델링 분석방법으 로 결정할 수 있도록 하였다.
Abstract
The effective reflection coefficients of an obliquely incident wave on a multi-layered substrate coated with a uniaxiallyanisotropic alignment layer are derived. The effective reflection coefficients as well as explicit ellipsometric expressions areprovided as a function of film constants of multiple layers together with magnitude of anisotropy, direction of optic axis, andthickness of the alignment layer. It is expected that by adapting these expressions to the conventional modelling technique, theordinary refractive index, the extra-ordinary refractive index, the azimuth angle and the tilt angle of the optic axis, and thethickness of the aligned surface can be determined simultaneously together with the thickness and volume fraction of each layerbeneath the alignment layer.
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