소산파 집적광학 바이오센서에 적합한 Si 3 N 4 립-광도파로 해석 및 설계에 관한 연구
Analysis and Design of Si 3 N 4 Rib-optical Waveguides for Evanescent-wave Integrated-optical Biosensors
0
조회
0
다운로드
1
인용
0
참고문헌
키워드
초록
소산파 기반 집적광학 바이오센서에 적합한 Si 3 N 4 립-광도파로 구조에 대한 해석적 분석을 통해서 단일모드 도파조건을 도출하 였다. 두-모드 간섭현상을 이용하는 집적광학 바이오센서 구조를 제시하고, 단일모드와 두-모드(감지영역)에 해당되는 립-광도파로 제원인 폭, 립 및 코어 두께 각각에 대해서 3 µm, 2 nm, 150 nm와 3 µm, 20 nm, 340 nm를 제안하였으며, FMM 전산해석을 통해서 감지영역의 두-모드들에 대한 광학적 특성들을 검토하였다.
Abstract
Si 3 N 4 rib-optical waveguides for evanescent-wave integrated-optical biosensors were analytically interpreted, to derive the single-mode propagation conditions. The integrated-optical biosensor structure based on two-mode interference was proposed, and the rib width and thickness and core thickness for a single-mode and two-mode waveguide (sensing region) were proposed to be 3 µm, 2 nm, and 150 nm and 3 µm, 20 nm, and 340 nm respectively. The optical characteristics of each guided-wave mode were investigated utilizing the film mode-matching (FMM) analysis.
참고문헌 (17)
- A. Z. Subramanian, "Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line", IEEE Photon. J, 5, pp.2202809~2202809 (2013)
- P. Muellner, "CMOS-compatible Si3N4 waveguides for optical biosensing", Procedia Eng, 120, pp.578~581 (2015)
- J. -C. Tinguely, "Silicon nitride waveguide platform for fluorescence microscopy of living cells", Opt. Express, 25, pp.27678~27690 (2017)
- A. Dhakal, "Silicon-nitride waveguides for on-chip Raman spectroscopy", Proc. SPIE, 9141, pp.91411C~ (2014)
- G. Vurtsever, "Integrated photonic circuit in silicon on insulator for Fourier domain optical coherence tomography", Proc. SPIE, 7554, pp.75514B~ (2010)
- F. T. Dullo, "Sensitive on-chip methane detection with a cryptophane-A cladded Mach-Zehnder interferometer", Opt. Express, 23, pp.31564~31573 (2015)
- 정홍식, "평면 광도파로 기반의 소산파 집적광학 바이오센서의 감지도 최적화에 관한정규화 해석에 관한 연구", 센서학회지, 27(1), pp.25~30 (2018), 한국센서학회[DOI]
- J. Riemensberger, "Dispersion engineering of thick high-Q silicon nitride ring-resonator via atomic layer deposition", Opt. Express, 20, pp.27661~27669 (2012)
- Z. Wu, "Design and optimization of optical modulators based on graphene-on-silicon nitride micro-ring resonators", J. Opt, 19, pp.045801~ (2017)
- A. Z. Subramanian, "Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip", Photon. Res, 3, pp.47~59 (2015)
- F. T. Dullo, "On-chip phase measurement for micro-particles trapped on a waveguide", Lab Chip, 15, pp.3918~3924 (2015)
- R. A. Soref, "Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2", IEEE J. Quantum Electron, 27, pp.1971~1974 (1991)
- S. P. Pogossian, "The singlemode condition for semiconductor rib waveguides with large cross section", J. Lightw. Technol, 16, pp.1851~1853 (1998)
- J. Schmidtchen, "Low loss single mode optical waveguides with large cross-selection in silicon-on-insulator", Electron. Lett, 27, pp.1486~1487 (1991)
- Photon Design Ltd, "FIMMWAVE v6.6.0", Oxford United Kingdom, ~
- K. E. Zinoviev, "Integrated bimodal waveguide interferometric biosensor for label-free analysis", J. Lightw. Technol, 29, pp.1926~1930 (2011)
- D. Duval, "Nanophotonic lab-on-a-chip platforms including novel bimodal interferometers, microfluidics and grating couplers", Lab Chip, 12, pp.1987~1994 (2012)