Si3N4 립-광도파로 기반 다중모드 간섭기와소산파를 이용하는 집적광학 바이오센서설계 및 성능에 관한 연구
A Study on the Design and Performance of Integrated-Optic Biosensor utilizing the Multimode Interferometer based on Si3N4 Rib-Optical Waveguide and Evanescent-Wave
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초록
본 논문에서는 Si/SiO2/Si3N4/SiO2 적층 구조를 갖는 Si3N4 립-광도파로 기반의 다중모드 간섭기를 활용하는 집적광학 소산파 바이오센서에 대해서 서술하였다. 다중모드 간섭기의 이론적 배경에 대해서 검토하였고, 전산해석을 통해서 다중모드간섭기 구조와 설계과정을 제시하였다. 다중모드 간섭기의 제원 (길이, 폭)이 소자 성능에 어떻게 영향을 미치는지 분석하였다. 분석물질의 굴절률 변화가 다중모드 간섭기의 모드 패턴형성 위치와 출력 광파워에 많은 영향을 미치고 있음을 확인하였고, 이 특성을 적용할 경우 집적광학 바이오센서로 활용 가능함을 입증하였다.
Abstract
In this paper, an integrated optical, evanescent-wave biosensor utilizing a multimode interferometer based on a Si3N4rib-optical waveguide consisting of the Si/SiO2/Si3N4/SiO2 stacked structure was described. The theoretical backgroundof the multimode interferometer was reviewed, and the structure and design process were presented through numericalcomputational analysis. We analyzed how the dimension (length, width) of the multimode interferometer affected thesensor performance. It has been confirmed through computational analysis that the changes in the refractive index of ananalyte greatly affect the mode pattern formation position and output optical power of a multimode interferometer, andproved that this principle could be applied to integrated-optic biosensor.
참고문헌 (13)
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