유해가스 차단시스템용 MEMS 가스 센서
MEMS based on nanoparticle gas sensor for air quality system
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초록
본 연구에서는 졸겔법으로 ZnO, 수열합성법으로 SnO2 나노분말을 제조하고 이들 나노분말에 Pd, Ru 등의 촉매를 첨가하였다. MEMS 기술로 제작된 히터 및 전극 구조 위에 나노 감지 분말을 도포하여 CO and NO2 가스 센서를 제작하였다. 0.1 wt% Pd 도핑된 SnO2 가스센서와 Ru 도핑된 ZnO 가스 센서는 각각 CO 30 ppm, NO2 1 ppm의 낮은 농도에서도 높은 감지 특성을 보였다.
Abstract
In this study, nanopower ZnO and SnO2 as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and NO2 sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped SnO2 sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and NO2 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.
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