4H-SiC UMOSFET의 gate dielectric 물질에 따른 온도 신뢰성 분석
Temperature reliability analysis according to the gate dielectric material of 4H-SiC UMOSFET
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초록
본 논문에서는 고전압, 고전류 동작에 적합한 4H-SiC UMOSFET에 대해서 연구하였다. 일반적으로 SiO2는 SiC MOSFET에서 gate dielectric으로 가장 많이 사용되는 물질이다. 하지만 4H-SiC보다 유전 상수 값이 2.5배 낮아서 높은 전계를 갖게되므로 SiO2/SiC 접합 부분에서 열악한 특성을 갖는다. 따라서 high-k 물질을 gate dielectric으로 적용한 소자를 SiO2를 적용한 소자와 TCAD 시뮬레이션을 통해 전기적 특성을 비교하였다. 그 결과 BV 감소, VTH 감소, gm 증가, Ron 감소를 확인하였다. 특히 온도가 300K일 때, Al2O3와 HfO2의 Ron은 66.29%, 69.49%가 감소하였으며 600K일 때도 39.71%, 49.88%가 감소하였다. 따라서 Al2O3와 HfO2가 고전압 SiC MOSFET의 gate dielectric 물질로써 적합함을 확인하였다.
Abstract
In this paper, a 4H-SiC UMOSFET was studied which is suitable for high voltage and high current applications. Ingeneral, SiO2 is a material most commonly used as a gate dielectric material in SiC MOSFETs. However, since thedielectric constant value is 2.5 times lower than 4H-SiC, it suffers a high electric field and has poor characteristics in theSiO2/SiC junction. Therefore, the static characteristics of a device with high-k material as a gate dielectric and a devicewith SiO2 were compared using TCAD simulation. The results show BV decreased, VTH decreased, gm increased, and Rondecreased. Especially when the temperature is 300K, the Ron of Al2O3 and HfO2 decreases by 66.29% and 69.49%. and at600K, Ron decreases by 39.71% and 49.88%, respectively. Thus, Al2O3 and HfO2 are suitable as gate dielectric materialsfor high voltage SiC MOSFET.
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