skull melting법에 의해 성장된 rutile 단결정 분석
Analysis of rutile single crystals grwon by skull melting method
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초록
스컬용융법에 의해 성장시킨 rutile단결정을 성장 축과 수평 또는 수직으로 절단한 후 ?.5 mm?.0 mm 크기의 웨이퍼로 양면연마 하였다. 연마한 흑색 웨이퍼들은 1200oC에서 3~15시간, 1300oC에서 10~50시간 annealing을 행함에 의해 옅은 황색으로 변화되었다. Annealing 후 구조적 및 광학적 특성은 비중, SEM-EBSP, XRD, FT-IR, laser Raman, PL 그리고 XPS 등으로 분석하였고, 이들 결과들은 공기중의 무게 증가, 수중의 무게 및 비중의 감소, 침상의 2차상, 산소이온 확산 및 Ti3+ 이온이 감소되는 것으로 분석되었다. 이는 스컬용융법에 의해 성장된 rutile 단결정에 Ov,-Ti3+, Ov-Ti3+ interstitial 그리고 F+-H+와 같은 결함의 존재를 의미한다.
Abstract
Rutile single crystals grown by skull melting method were cut paralel and perpendicular to growth axis, and bothsides of the cut wafers (5.5 m×1.0 m) were then polished to be miror surfaces. The black wafers were changed into paleyellow color by annealing in air at 1200 and 1300oC for 3~15 and 10~50 hours, respectively. After annealing, structural and(XRD), FT-IR transmittance spectra, laser Raman spectroscopy (LRS), photoluminescence (PL) and X-ray photoelectronspectroscopy (XPS). These results are analyzed increase of weight in air, decrease of weight in water and specific gravity,shown secondary phase of needle shape, diffusion of oxygen ion and increase of Ti3+. From the above results, we suggest thatthe skull melting method grown rutile single crystals contain defect centers such as Ov,-Ti3+, Ov-Ti3+ interstitials and F+-H+.Key words Rutile, Ov,-Ti3+, Ov-Ti3+ interstitial, F+-H+Skull melting.. .. ... rutile ... .....†.. ........ ..... , .. , 520-714......... , .. , 133-791(2006. 7. 3. .. )(2006. 8. 8. .... )
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