Sol-gel법에 의한 LiCoO2 박막의 합성과 특성평가
Synthesis and characterization of LiCoO2 thin film by sol-gel process
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LiCoO2는 박막 베터리의 양극재료로써 많은 관심을 받고 있다. 본 연구에서는 스핀 코터를 이용한 졸-겔 합성공정과 열처리 과정에 의해서 Au 지지체 위에 LiCoO2 박막을 합성하였다. 합성된 박막의 구조는 X-선회절분석, 라만분광광도계를 이용하여 분석하였다. 박막의 입자 형태는 전자현미경에 의해 관찰하였다. X-선회절분석, 라만분광광도계의 결과로부터, 550oC와 750oC에서 합성된 박막은 스피넬구조와 층상 암염 형 구조를 가지는 박막으로 보이며, 650oC에서 합성된박막은 층상 암염 형 구조와 스피넬 구조가 혼재되어져 있는 것으로 생각된다. 750oC에서 합성된 박막은 다른 낮은 온도에서 합성된 박막보다 큰 결정질의 균일한 분포의 입자를 가지는 것으로 확인되었다.
Abstract
LiCoO2 thin film has received diverse attention as cathodes material of thin-film micro-batteries. In this study,LiCoO2 thin films were synthesized on Au substrates by sol-gel spin coating method and an annealing process. Theirstructures were studied using X-ray diffraction and Raman Spectroscopy. The particle morphologies of these thin films wereobserved by Scaning electron microscope. From the results of X-ray diffractometry and Raman Spectroscopy analyses, itwas found that as-grown films had the structure of spinel (LT-LiCoO2) and layered-Rock-salt (HT-LiCoO2) at 550oC and750oC respectively. The annealed films at 650oC were presumed to be the mixed state of these two types. Throlugh thescanning electron microscope, It was estimated that the particle size in as-grown films at 750oC, were larger crystillineparticle than in those at the other lower temperature and well distributed in the film.
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