Sol-Gel 법을 이용한 칼슘-알루미네이트계 전자화물 박막의 제조와 특성
Fabrication and properties of Calcium-aluminate electride thin films using by sol-gel process
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초록
Sol-gel법을 적용하여 12CaO·7Al2O3(C12A7) 전자화물 박막을 제조하기 위해 CaO-Al2O3 sol을 제조하여 dip 코팅법을 적용하여 quartz 기판에 박막을 형성하였으며 열처리를 통해 C12A7의 박막을 제조하였다. C12A7 상의 형성은800oC에서 시작되었고 1,200oC 온도에서 1시간 열처리를 통해 치밀화된 박막을 제조할 수 있었다. 제조된 C12A7 박막은부도체였지만 수소 환원 분위기 열처리를 통해 전기전도도를 나타내기 시작했으며 1,200oC 48시간 열처리 시 120 S/cm의전기전도도를 나타내었다.
Abstract
The Calcium-aluminate electride thin films on the quartz substrates was coated by sol-gel process. The crystallization of the C12A7 thin film was observed at 800oC and high density C12A7 thin film was achieved on heat treatment at 1,200oC for 1 hour. The reduction heat treatment of C12A7 thin film could be converted from insulator to conductor and the electrical conductivity was 120 S/cm in the C12A7 thin film heat treated at 1,200oC with H2 gas for 48 hours.
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