전자 소자 응용을 위한 MXene의 산화 공정 및 물성 분석 연구
Synthesis of oxidized MXene and its functionalization process for electrical device
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초록
2차원 소재인 Ti3C2Tx MXene은 분자 수준의 극박막 특성과 평면 방향에서의 우수한 기계적 안정성, 우수한 전하 전도성과 광화학적 특성으로 인해 전기 화학 촉매, 화학 센서, 에너지, 환경 및 분자 센서 등 다양한 응용 분야에서 주목받는 소재로 떠오르고 있다. 본 연구는 Ti3C2Tx의 제조와 함께 Ti3C2Tx이 산화됨에 따라 형성되는 이산화타이타늄(TiO2)에 의한 전기적 특성 변화를 관측하였다. Oxidized Ti3C2Tx은 TiO2의 형성으로 인해, Ti3C2Tx과 비교할 때 화학 구조 및 조성의 변화가 전기적 특성을 변조하였다. 특히 Ti3C2Tx에 TiO2가 형성됨에 따라 2 단자 소자 구조에서 기존 Ti3C2Tx의 Ohmic 특성에서 Schottky 특성으로 변환되었고, Oxidized Ti3C2Tx의 전하 밀도가 제어됨에 따라, 메모리 소자에서는 이력 현상의 증가가 관측되었다. 또한 전기적 특성 변화의 결과로 NO2 가스 분자 흡착에 대한 높은 반응성을 보여주어, 센서 및 다기능 소자로의 적용 가능성을 제시하였다.
Abstract
The Ti3C2Tx MXene is an emerging material for electrical devices, sensing, energy, environmental, and biomedical applications. Therefore, the effective development of synthesis and functionalization strategy has been triggered from delamination via etching routes to the addition of functional groups. The present report demonstrates the synthesis of Ti3C2Tx and modification by titanium dioxide (TiO2). The incorporation of titanium dioxide (TiO2) showed different morphology, chemical structures, and chemical composition compared to Ti3C2Tx. Moreover, the electrical characteristics have been investigated and showed a promising performance as semiconductor devices. The existence of titanium dioxide turned the Ti3C2Tx IV characteristics from ohmic behavior toward the Schottky behavior, resulting in enhanced hysteresis of memory devices and responsibility of chemical sensors upon NO2 gas.
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