소결조제 없이 유도가열로를 이용해 소결된 질화알루미늄의 특성 연구
Study on the properties of aluminum nitride sintered using an induction furnace without sintering additives
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
본 연구에서는 μm 및 nm 크기를 갖는 상용 AlN 분말을 XRD 분석을 통해 선별 후, 유도가열로를 활용하여 상이한 온도에서 소결하여 최적화된 소결 온도 및 물성 특성을 조사하였다. 소결 온도는 1,500, 1,700 그리고 1,900°C N₂ 분위기에서 진행되었으며, 소결된 AlN 펠렛은 SEM, XRD, Raman 분석을 이용하여 최적화된 소결 온도 조건을 확립하였다. 또한 Impedance 분석을 진행하여 소결 조제 없이 제작된 AlN 펠렛의 전기적 특성을 확인하였다.
Abstract
In this study, the crystal characteristics of commercial AlN powders with sizes of “μm” and “nm” were selected through XRD analysis and then sintered at different temperatures through an induction heating furnace to investigate the optimized sintering temperature and physical properties. The sintering temperature was 1,500, 1,700, and 1,900°C in the N₂ atmosphere, and the optimized sintering temperature conditions were established for the sintered AlN pellets using SEM, XRD, and Raman analysis. Additionally, impedance analysis was performed to confirm the electrical properties of the optimized AlN pellet without sintering additives.
참고문헌 (10)
- G. A. Slack, "Nonmetallic crystals with high thermal conductivity", J. Phys. Chem. Solids, 34, pp.321~ (1973)
- L. M. Sheppard, "Aluminum nitride : a versatile but challenging material", Am. Ceram. Soc. Bull, 69, pp.1801~ (1990)
- J. F. Daviet, "Electrostatic clamping applied to semiconductor plasma processing I. theoretical modeling", J. Electrochem. Soc, 140, pp.3245~ (1993)
- Y. Baik, "Aluminum nitride: processing and applications", Key Eng. Mater, 122-124, pp.553~ (1996)
- K. Watari, "Effective sintering aids for low-temperature sintering of AlN ceramics", J. Mater. Res, 14, pp.1409~ (1999)
- A. V. Virkar, "Thermodynamic and kinetic effects of oxygen removal on the thermal conductivity of aluminum nitride", J. Am. Ceram. Soc, 72, pp.2031~ (1989)
- K. Komeya, "Role of Y2O3 and SiO2 additions in sintering of AlN", J. Am. Ceram. Soc, 54, pp.411~ (1974)
- H. M. Lee, "Processing and characterization of aluminum nitride ceramics for high thermal conductivity", Adv. Eng. Mater, 16, pp.655~ (2014)
- P. Motamedi, "XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition", Appl. Surf. Sci, 315, pp.104~ (2014)
- J. W. Lee, "Electrical behavior of aluminum nitride ceramics sintered with yttrium oxide and titanium oxide", J. Korean. Ceram. Soc, 53, pp.635~ (2016)