AlN의 형성에 미치는 기계적 합금화 분위기의 영향

Abstract

In order to investigate the formation of AlN, mechanical alloying was carried out in N2 and NH3 atmosphere. Differential thermal analysis (DTA), x-ray diffraction (XRD) and chemical analysis were carried out to examine the formation behavior of aluminum nitrides. No diffraction pattern of AlN was observed in XRD analysis of the as-milled powders in NH3 or N2 atmosphere. However, DTA and chemical analysis indicated that the precursors for AlN were formed in the Al powders milled in NH3 atmosphere. The AlN precursors transformed to AlN after heat treatment at and above 600℃. It was considered that the reaction between Al and NH3 was possible by the formation of fresh Al surface during mechanical alloying of Al powders.