폴리머 마이크로링 공진기를 이용한 고감도 집적광학형 온도센서
Highly Sensitive Integrated Photonic Temperature Sensor Exploiting a Polymeric Microring Resonator
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초록
본 논문에서는 폴리머 마이크로링 공진기 기반의 고감도 집적광학형 온도센서를 제안하고 구현하였다. 이 센서는 열광학효과로 인한 공진기 소자의 공진파장의 이동으로부터 주변 온도 변화를 측정한다. 열팽창계수가 작은 실리콘 기판 위에 열광학계수가 큰 폴리머를 도입하여 공진기 센서를 제작함으로써 센서의 감도를 향상시켰다.상온 부근20℃ ~ 30℃의 범위에서 얻어진 온도센서의 감도는 약 -165 pm/℃였고,온도분해능은0.1℃이하였다. 그리고 제작된 온도센서의 동작 특성은 표면에 놓여진 분석대상물의 굴절률 변화에 거의 영향을 받지 않음을 확인하였다. 따라서 제작된 센서는 다른 광센서에 집적되어 주변 온도 변화로 인하여 유발되는 오차 를 효과적으로 보정할 수 있을 것으로 기대된다.
Abstract
A highly sensitive integrated photonic temperature sensor was proposed and developed incorporating a polymeric microring resonator. The change in the ambient temperature was estimated by observing the shift in the resonant wavelength of the resonator induced via the thermooptic effect. For the purpose of enhancing its sensitivity, the sensor was built by implementing a polymeric resonator exhibiting a high thermooptic coefficient on a silicon substrate with a small coefficient of thermal expansion. For the range of from 20℃ to 30℃ near the room temperature, the fabricated sensor yielded a sensitivity of as high as 165 pm/℃ and a resolution of better than 0.1℃. And its performance was found to be hardly affected by the variation in the refractive index of the target analyte, which was applied to the surface of the sensor. It is hence expected that the sensor could be integrated with other refractormetric optical sensors, thereby compensating for the fatal error caused by the change in the ambient temperature.
참고문헌 (14)
- R.G.Heideman, "Remote opto-chemical sensing with extreme sensitivity:design,fabrication and performance of a pigtailed integrated optical phase-modulated Mach-Zehnder interferometer system", Sens.Actuators BChem, 61(1), pp.100~127 (1999)
- P.Adam, "Multiple surface plasmon spectroscopy for study of biomolecular systems", Sens.Actuators BChem, 113(2), pp.774~781 (2006)
- A.Brandenburg, "Differential refractometry by an integratedoptical Young interferometer", Sens.Actuators BChem, 39(1), pp.266~271 (1997)
- C.Y.Chao, "Polymer microring resonators for biochemical sensing applications", IEEE J.Sel.Top.Quantum Electron, 12(1), pp.134~142 (2006)
- A.Yalcin, "Optical sensing of biomolecules using microring resonators", IEEE J.Sel.Top.Quantum Electron, 12(1), pp.148~155 (2006)
- K.D.Vos, "Silicon-on-insulator microring resonator for sensitive and label-free biosensing", Opt.Exp, 15(12), pp.7610~7615 (2007)
- 김건덕, "수직형 폴리머 마이크로링 공진기 기반의 글루코스 바이오 센서", 한국광학회지, 19(2), pp.127~131 (2008), 한국광학회
- Y.Liu, "An integrated optical sensor for measuring glucose concentration", Appl.Phys. B, pp.18~23 (1992)
- S. L. Tsao, "A novel MMI-MI SOI temperature sensor", in Proc. 13th Ann. Meeting IEEE Lasers and Electro-Optics Society, 2, pp.464~465 (2000)
- A.Irace, "All-silicon optical temperature sensor based on multi-mode interference", Opt.Exp, 11(22), pp.2807~2812 (2003)
- M.Remouche, "Intrinsic integrated optical temperature sensor based on waveguide bend loss", Optics & Laser Technology, 39(7), pp.1454~1460 (2007)
- X. Zhang, "Design,fabrication and characterization of optical microring sensors on metal substrates", J.Micromech.Microeng, 18(1), pp.015025~ (2008)
- A.Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides", Electron.Lett, 36(4), pp.321~322 (2000)
- "ZPU and LFR polymers"[URL]