SOI 슬롯 광 도파로 기반 단일 및 삽입-분기 채널 링-공진형 바이오·케미컬집적광학 센서의 제원에 대한 감도 해석
Sensitivity Analysis for Specifications of Silicon-on-Insulator (SOI) Slot Optical Waveguide-based Single and Add–drop Channel Ring-resonant Biochemical Integrated Optical Sensors
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초록
The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add–drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add–drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 µm and coupling gap of 0.5 µm were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.
Abstract
The effects of ring radius and coupling spacing on the free spectral range (FSR), full width at half maximum (FWHM), quality factor, and sensitivity of single-channel and add–drop channel slot ring resonators were systematically investigated using FIMMPROP and PICWAVE numerical software. The single-channel ring resonator exhibited better characteristics, namely, a wider FSR and narrower FWHM compared with the add–drop structure; thus, it was evaluated to be more suitable for biochemical sensors. The FSR, FWHM, quality factor, and sensitivity for a single channel ring resonator with a radius of 59.4 µm and coupling gap of 0.5 µm were 2.4 nm, 0.087 nm, 17677, and 550 [nm/RIU], respectively.
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