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Beryllium oxide utilized in nuclear reactors: Part I: Application history, thermal properties, mechanical properties, corrosion behavior and fabrication methods

Liu Bing|Zhou Xiang-wen|Hou Ming-dong
한국원자력학회 (Korean Nuclear Society)|2022.12|Nuclear Engineering and Technology|제54권 제12호|pp. 4393-4411|DOI 10.1016/j.net.2022.07.017

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Mechanical propertiesCorrosion behaviorThermal propertiesNuclear reactorBeryllium oxideFabrication methods
주제분류원자력공학

초록

In recent years, beryllium oxide has been widely utilized in multiple compact nuclear reactors as the neutron moderator, the neutron reflector or the matrix material with dispersed nuclear fuels due to its prominent properties. In the past 70 years, beryllium oxide has been studied extensively, but rarely been systematically organized. This article provides a systematic review of the application history, thermal properties, mechanical properties, corrosion behavior and fabrication methods of beryllium oxide. Data from previous literature are extracted and sorted out, and all of these original data are attached as the supplementary material, so that subsequent researchers can utilize this paper as a database for beryllium oxide research in reactor design or simulation analysis, etc. In addition, this review article also attempts to point out the insufficiency of research on beryllium oxide, and the possible key research areas about beryllium oxide in the future.

Abstract

In recent years, beryllium oxide has been widely utilized in multiple compact nuclear reactors as the neutron moderator, the neutron reflector or the matrix material with dispersed nuclear fuels due to its prominent properties. In the past 70 years, beryllium oxide has been studied extensively, but rarely been systematically organized. This article provides a systematic review of the application history, thermal properties, mechanical properties, corrosion behavior and fabrication methods of beryllium oxide. Data from previous literature are extracted and sorted out, and all of these original data are attached as the supplementary material, so that subsequent researchers can utilize this paper as a database for beryllium oxide research in reactor design or simulation analysis, etc. In addition, this review article also attempts to point out the insufficiency of research on beryllium oxide, and the possible key research areas about beryllium oxide in the future.

참고문헌 (120)

  1. I.E. Cooper, "A Study of the Methods of Extracting Beryllia from Beryl", pp.1920
  2. L. W. Mckeehan, "The crystal structure of beryllium and of beryllium oxide", Proc. Natl. Acad. Sci. U. S. A, 8(9), pp.270~274 (1922)[DOI]
  3. M. L. E. Oliphant, "Experiments on the transmutation of elements by protons", Proc. Roy. Soc. A, 141, pp.259~281 (1933)[DOI]
  4. C. B. Sawyer, "Newer developments in beryllium", Ind. Eng. Chem, 30(5), pp.501~505 (1938)[DOI]
  5. H. E. White, "Beryllium oxide : I", J. Am. Ceram. Soc, 22, pp.185~189 (1939)[DOI]
  6. H. E. White, "Beryllium oxide refractories : II", J. Am. Ceram. Soc, 23, pp.157~159 (1940)[DOI]
  7. The Heavy Water-Slurry Pile, "H.C. Urey", Columbia University, ~, pp.Report A-743 (1943)
  8. Suggestions for a High-Temperature Pebble Pile, "F. Daniels", Oak Ridge National Laboratory, 2172~, pp.Report MUC-FD-8 (1944)
  9. M. T. Simnad, "The early history of high-temperature helium gas-cooled nuclear power reactors", Energy, 16(1-2), pp.25~32 (1991)[DOI]
  10. W. D. Manly, "Utilization of BeO in reactors", J. Nucl. Mater, 14, pp.3~18 (1964)[DOI]
  11. L. R. Hafstad, "Reactors", Sci. Am, 184(4), pp.43~51 (1951)[DOI]
  12. B. C. Hacker, "Whoever Heard of Nuclear Ramjets?", Project Pluto, 1, pp.85~98 (1995)
  13. Aircraft Nuclear Propulsion Project, "A. M. Weinberg", Oak Ridge National Laboratory, 2172~, pp.Report ORNL-629 (1950)
  14. E. S. Bettis, "The aircraft reactor experiment-operation", Nucl. Sci. Eng, 2(6), pp.841~853 (1957)[DOI]
  15. W. K. Ergen, "The aircraft reactor experimentphysics", Nucl. Sci. Eng, 2(6), pp.826~840 (1957)[DOI]
  16. Aircraft Reactor Experiment Metallurgical Aspects, "W. D. Manly", Oak Ridge National Laboratory, ~, pp.Report ORNL-2349 (1958)
  17. Properties of BeO Ceramics and Their Application in a Nuclear Propulsion System (Pluto), "A.J. Rothman", Lawrence Radiation Laboratory, University of California, ~, pp.Report UCRL-6743 (1962)
  18. Beryllium Oxide for Nuclear Propulsion Application, "A.J. Rothman", Lawrence Radiation Laboratory, University of California, ~, pp.Report UCRL-7428 (1963)
  19. The Experimental Beryllium Oxide Reactor. Maritime Gas-Cooled Reactor Program, "W. C. Moore", General Atomic Division, General Dynamic Corporation, 2172~, pp.Report GA-2385 (1961)
  20. Maritime Gas-Cooled Reactor Program. A Review of the Maritime Gas-Cooled Reactor Program, "K. A. Trickett", General Atomic Division, General Dynamic Corporation, 2172~, pp.Report GA-2603 (1961)
  21. MGCR-Carbon Dioxide Cycle Studies, "D.F. Putnam", General Atomic Division, General Dynamic Corporation, ~, pp.Report MGCRP-177 (1958)
  22. Army Gas-Cooled Reactors System Program. Transportability Studies, ML-1Nuclear Power Plant, "J. W. Blakley", Aerojet-General Nucleonic, ~, pp.Report Ido-28555 (1960)
  23. W. H. Roberts, "The Australian high temperature gas-cooled reactor feasibility study", J. Nucl. Mater, 14, pp.29~40 (1964)[DOI]
  24. H. Kronberger, "The role of dispersed fuels in the future development of the advanced gas-cooled reactor", J. Nucl. Mater, 14, pp.41~48 (1964)[DOI]
  25. Development of High Temperature Thermal Reactors in Germany, "R. Hecker", ~, pp.Report EUR 3493e (1966)
  26. A. Bicevskis, "Thorium fuel cycle for a beryllium oxide pebble-bed reactor", Thorium Fuel Cycle Proc, pp.129~155 (1968)
  27. Zirconium Hydride Reactor Control Reflector Systems: Summary Report, "P. H. Horton", Atomics International Division, ~, pp.Report AI-AEC-13078 (1972)
  28. D.J. Cockeram, "SNAP 2, 8, and 10A Reactor Programs Progress Report   Presented at the AIAA Third Biennial Aerospace Power Systems Conference, Philadelphia, Pa., September 1-4, 1964 (not preprinted). This work was performed under Atomic Energy Commission Contract AT(11-1)-GEN-8.", Progress in Astronautics and Rocketry, pp.393~415 (1966), Elsevier[DOI]
  29. "Calculated Power Distribution of a Thermionic, Beryllium Oxide Reflected, Fast-Spectrum Reactor, NASA TM X-2838" (1973)[URL]
  30. "Advanced-Power-Reactor Design Concepts and Performance Characterristics, NASA TM X-2957" (1974)[URL]
  31. Nuclear Reactors for Space Electric Power, "D. Buden", Los Alamos Scientific Laboratory, 2172~, pp.Report LA-7290-SR (1978)
  32. Design and Proposed Utilization of the Sandia Annular Core Research Reactor (ACRR), "J.V. Walker", Sandia Laboratory, ~ (1979)
  33. A. M. Perry, "Thermal breeder reactors", Annu. Rev. Nucl. Sci, 22, pp.317~354 (1972)[DOI]
  34. Proust, Space Nuclear Power Studies in France-A New Concept of Particle Bed Reactor, "B. Vrillon", CEA Centre d'Etudes Nucleaires de Saclay, ~, pp.Report CEA-CONF-9696 (1988)
  35. D. K. Mohapatra, "Theoretical and experimental investigations of reactor parameters in a U-233 fuelled research reactor", Ann. Nucl. Energy, 31(2), pp.197~212 (2004)[DOI]
  36. S. Usha, "Research reactor KAMINI", Nuclear Engineering and Design, 236(7-8), pp.872~880 (2006), Elsevier BV[DOI]
  37. R. Sanchez, "Kilowatt reactor using stirling TechnologY(KRUSTY)component-critical experiments", Nucl. Technol, 206, pp.56~67 (2020)[DOI]
  38. KiloPower Space Reactor Concept-Reactor Materials Study, "P. McClure", Los Alamos National Laboratory, ~, pp.Report LA-UR-14-23402 (2014)
  39. J. C. King, "Submersion-subcritical safe space(S4)reactor", Nucl. Eng. Des, 236(17), pp.1759~1777 (2006)[DOI]
  40. I. V. Dulera, "High temperature reactors", J. Nucl. Mater, 383(1-2), pp.183~188 (2008)
  41. S. Dawahra, "Investigation of BeO as a reflector for the low power research reactor", Prog. Nucl. Energy, 81, pp.1~5 (2015)[DOI]
  42. Z. Gholamzadeh, "Computational investigation of Tehran research reactor graphite reflector replacement with Be, BeO or D2O and its impacts on thermal neutron flux enhancement", Int. J. Nucl. Energy Sci. Technol, 13(4), pp.350~371 (2019)[DOI]
  43. M.J. Naramore, "High Thermal Conductivity UO2-BeO Nulcear Fuel: Neutronic Performance Assessments and Overview of Fabrication", Master, pp.2010
  44. C. Garcia, "Sintering and Thermal Behavior of Uranium Dioxide in Beryllium Oxide Matrix", Master, pp.2014
  45. T. Zahradka, "Cost saving when using enhanced conductivity nuclear fuel containing BeO in WWER-1000 reactors", Proceedings of the 201422nd International Conference on Nuclear Engineering (2014)
  46. C. S. Handwerk, "Optimized core design of a supercritical carbon dioxide-cooled fast reactor", Nucl. Technol, 164(3), pp.320~336 (2008)[DOI]
  47. D.M. Camarano, "Increase of thermal conductivity of uranium dioxide nuclear fuel pellets with beryllium oxide addition", CBECIMAT: Brazilian congress of engineering and materials science (2016)
  48. V. K. Mehta, "Selection of a space reactor moderator using lessons learned from SNAP and ANP programs", AIAA Propulsion and Energy 2019 Forum (2019)
  49. I. Pioro, "Generation IV nuclear reactors as a basis for future electricity production in the world", Process. Energy, pp.818~830 (2013)
  50. H. A. Wriedt, "The Be-O(Beryllium-Oxygen)system", Bull. Alloy Phase Diagrams, 6, pp.553~558 (1985)[DOI]
  51. R.C. Ropp, "Encyclopedia of the Alkaline Earth Compounds", pp.105~197 (2013), Elsevier
  52. D. K. Smith, "The crystal structure of beta beryllia", J. Nucl. Mater, 14, pp.237~238 (1964)[DOI]
  53. K. Kobashi, "Diamond Films", pp.91~118 (2005), Elsevier
  54. B. Bellamy, "The lattice parameter and density of beryllium oxide determined by precise X-ray methods", J. Nucl. Mater, 6(1), pp.1~4 (1962)[DOI]
  55. Beryllium Oxide: Properties and Applications, "R. A. Belyaev", United States Atomic Energy Commission, ~, pp.Report AEC-Tr-6175 (1964)
  56. K. K. Kelley, "Critical evaluation of high-temperature heat capacities of inorganic compounds", US. Bur. Mines, Bull, (476) (1949)
  57. K. K. Kelley, "The specific heats at low temperatures of beryllium oxide and beryllium orthosilicate(phenacite)", J. Am. Chem. Soc, 61(5), pp.1217~1218 (1939)[DOI]
  58. Beryllium Oxide (BeO) Handbook, "J. J. Petrovic", Los Alamos National Laboratory, 2172~, pp.Report LA-UR-20-24561 (2020)
  59. S. C. Carniglia, "Fabrication and properties of dense beryllium oxide", J. Nucl. Mater, 4(2), pp.165~176 (1961)[DOI]
  60. A.C. Victor, "Thermodynamic properties of magnesium oxide and beryllium oxide from 298 to 1,200", K, J. Res. Natl. Bur. Stand. A. Phys. Chem, 67(4), pp.325~329 (1963)
  61. Y. N. Makurin, "Firstprinciple quantum-chemical calculations of several thermomechanical parameters of beryllium ceramics", Refract. Ind. Ceram, 47(5), pp.310~313 (2006)[DOI]
  62. C. F. Cline, "Elastic constant of hexagonal BeO, ZnS, and CdSe", J. Appl. Phys, 38(4), pp.1944~1948 (1967)[DOI]
  63. J. J. Quinn, "Solid State Physics: Principles and Modern Applications", pp.1007~ (2009), Springer
  64. M. Burk, "Thermal conductivity of beryllia ceramics from-200"C to 150"C", J. Am. Ceram. Soc, 46(3), pp.150~151 (1963)[DOI]
  65. R. E. Taylor, "Thermal conductivity and expansion of beryllia at high temperatures", J. Am. Ceram. Soc, 45(2), pp.74~78 (1962)[DOI]
  66. M. Adams, "Thermal conductivity: III, prolate spheroidal envelope method", J. Am. Ceram. Soc, 37(2), pp.74~79 (1954)[DOI]
  67. W. D. Kingery, "Thermal conductivity: XII, temperature dependence of conductivity for single-phase ceramics", J. Am. Ceram. Soc, 38(7), pp.251~255 (1955)[DOI]
  68. J. Francl, "Thermal conductivity: IV, apparatus for determining thermal conductivity by a comparative method", J. Am. Ceram. Soc, 37(2), pp.80~84 (1954)[DOI]
  69. M. McQuarrie, "Thermal conductivity: VII, analysis of variation of conductivity with temperature for Al2O3, BeO, and MgO", J. Am. Ceram. Soc, 37(2), pp.91~95 (1954)[DOI]
  70. H. Luo, "Effect of film thickness on the temperature dependence of thermal conductivity for diamond", BeO composites, 2015, pp.41(9), 12052~12057
  71. B. N. Rath, "Thermal conductivity of composites of beryllia and liythium titanate", J. Mater. Eng. Perform, 22(11), pp.3455~3460 (2013)[DOI]
  72. A. G. Kharlamov, "Thermal conductivity of beryllium oxide in the 1000-2000"C Range", Sov. Energy, 15(6), pp.1313~1315 (1963)[DOI]
  73. V. S. Kiiko, "Thermal conductivity and prospects for application of BeO ceramic in electronics", Glass Ceram, 71(11-12), pp.387~391 (2015)[DOI]
  74. G. P. Akishin, "Thermal conductivity of beryllium oxide ceramic", Refract. Ind. Ceram, 50(6), pp.465~468 (2009)[DOI]
  75. M. B. Bebek, "Temperature dependence of phonon-defect interactions : phonon scattering vs. phonon trapping", Sci. Rep, 6, pp.32150~ (2016)[DOI]
  76. A. W. Pryor, "Thermal conductivity at low temperature of neutron-irradiated BeO", J. Nucl. Mater, 14, pp.208~219 (1964)[DOI]
  77. G. A. Slack, "Nonmetallic crystals with high thermal conductivity", J. Phys. Chem. Solids, 34(2), pp.321~335 (1973)[DOI]
  78. Y. M. Kozlovskii, "Thermal expansion of beryllium oxide in the temperature interval 20-1550"C", High Temp, 52(4), pp.536~540 (2014)[DOI]
  79. R. W. Swindeman, "Thermal shock tests on beryllia", J. Nucl. Mater, 14, pp.404~415 (1964)[DOI]
  80. E. S. Lukin, "Some thermomechanical properties of pure oxide ceramics", Refractories, 4, pp.347~352 (1963)[DOI]
  81. R. E. Fryxell, "Creep, strength, expansion, and elastic moduli of sintered BeO as a function of grain size, porosity, and grain orientation", J. Am. Ceram. Soc, 47, pp.283~291 (1964)[DOI]
  82. J. D. Patterson, "Solid-State Physics: Introduction to the Theory" (2018), Springer International Publishing AG
  83. H. Iwanaga, "Anisotropic thermal expansion in wurtzite-type crystals", J. Mater. Sci, 35, pp.2451~2454 (2000)[DOI]
  84. Beryllia, its Physical Properties at Elevated Temperatures, "B. Schwartz", Massachusetts Institute of Technology, ~, pp.Report 1083 (1952)
  85. Some Properties of Beryllium Oxide, "J. Lillie", Lawrence Radiation Laboratory, 2172~, pp.Report UCRL-6457 (1961)
  86. R. M. Spriggs, "Effect of open and closed pores on elastic moduli of polycrystalline alumina", J. Am. Ceram. Soc, 45(9), pp.454~ (1962)[DOI]
  87. D. P. H. Hasselman, "On porosity dependence of elastic moduli of polycrystalline refractory materials", J. Am. Ceram. Soc, 45(9), pp.452~453 (1962)[DOI]
  88. Physical Properties of Sintered BeO as Influenced by Microstructure, "B. A. Chandler", General Electric, ~, pp.Report TM-63-5-4 (1963)
  89. J. J. Gangler, "Some physical properties of eight refractory oxides and carbides", J. Am. Ceram. Soc, 33, pp.367~374 (1950)[DOI]
  90. I. Y. Guzman, "Some properties of porous ceramics made of beryllium oxide", Refractories, 3, pp.347~351 (1962)[DOI]
  91. S. C. Carniglia, "Hot pressing for nuclear applications of BeO; process, product, and properties", J. Nucl. Mater, 14, pp.378~394 (1964)[DOI]
  92. G. G. Bentle, "Dislocations, slip, and fracture in BeO single crystals", J. Appl. Phys, 38, pp.4248~4257 (1967)[DOI]
  93. M. K. Ferber, "Static fatigue behavior of polycrystalline beryllia", J. Am. Ceram. Soc, 73(7), pp.2038~2046 (1990)[DOI]
  94. G. G. Bentle, "Brittle and plastic behavior of hot-pressed BeO", J. Am. Ceram. Soc, 48(11), pp.570~577 (1965)[DOI]
  95. K. D. Reeve, "Fabrication and structure of beryllium oxide-based fuels", J. Nucl. Mater, 14, pp.435~443 (1964)[DOI]
  96. F. P. Knudsen, "Dependence of mechanical strength of brittle polycrystalline specimens on porosity and grain size", J. Am. Ceram. Soc, 42(8), pp.376~387 (1959)[DOI]
  97. Preparation of Dense Beryllium Oxide, "C. Hyde", Battelle Memorial Institute, ~, pp.Report BMI-1020 (1955)
  98. D. A. Krohn, "Comparison of thermal-stress resistance of polycrystalline Al2O3 and BeO", J. Am. Ceram. Soc, 56(9), pp.490~491 (1973)[DOI]
  99. R. R. Vandervoort, "Compressive creep of polycrystalline beryllium oxide", J. Am. Ceram. Soc, 46(4), pp.180~184 (1963)[DOI]
  100. R. Chang, "High temperature creep and anelastic phenomena in polycrystalline refractory oxides", J. Nucl. Mater, 1(2), pp.174~181 (1959)[DOI]
  101. W. L. Barmore, "High-temperature plastic deformation of polycrystalline beryllium oxide", J. Am. Ceram. Soc, 48(10), pp.499~505 (1965)[DOI]
  102. W. L. Barmore, "High-temperature creep and dislocation etch pits in polycrystalline beryllium oxide", J. Am. Ceram. Soc, 50(6), pp.316~320 (1967)[DOI]
  103. D. T. Livey, "Magnesia, Alumina, Beryllia Ceramics: Fabrication, Characterization and Properties: High Temperature Oxides Part III", pp.1~52 (1970), Academic Press Inc.
  104. G. Vasudevamurthy, "Uranium carbide properties for advanced fuel modeling-A review", J. Nucl. Mater, 558, pp.153145~ (2022)
  105. H. Forst, "Deformation-Mechanism Maps: the Plasticity and Creep of Metals and Ceramics" (1982), Pergamon Press
  106. L. Brassart, "Bounds for shear viscosity in Nabarro-Herring-Coble creep", Mech. Mater, 137, pp.103106~ (2019)
  107. W. I. Stuart, "The high temperature reaction between beryllia and water vapour", J. Nucl. Mater, 14, pp.417~424 (1964)[DOI]
  108. J. B. Conway, "Techniques for measuring localized corrosion rates of beryllium oxide", J. Nucl. Mater, 14, pp.425~433 (1964)[DOI]
  109. L. I. Grossweiner, "The reaction of beryllium oxide with water vapor", J. Am. Chem. Soc, 74(11), pp.2701~2704 (1952)[DOI]
  110. W. A. Young, "The reactions of water vapor with beryllia and beryllia-alumina compounds", J. Am. Chem. Soc, 64, pp.1003~1006 (1960)[DOI]
  111. M. J. Bannister, "Sinterability studies on various BeO powders", J. Nucl. Mater, 14, pp.303~309 (1964)[DOI]
  112. B. R. Steele, "The preparation and characterisation of ceramic grade BeO", J. Nucl. Mater, 14, pp.310~314 (1964)[DOI]
  113. D. T. Livey, "Sintering and densification studies on BeO powders", J. Nucl. Mater, 14, pp.285~293 (1964)[DOI]
  114. W. W. Beaver, "Effects of powder characteristics, additives and atmosphere on the sintering of sulfate-derived BeO", J. Nucl. Mater, 14, pp.326~337 (1964)[DOI]
  115. S. C. Carniglia, "Hot pressing for nuclear applications of BeO; process, product and properties", J. Nucl. Mater, 14, pp.378~394 (1964)[DOI]
  116. R. J. Brown, "Fabrication and properties of commercial beryllia ceramics for nuclear application", J. Nucl. Mater, 14, pp.341~348 (1964)[DOI]
  117. T. E. Clare, "Studies in the cold pressing and sintering of beryllia", J. Nucl. Mater, 14, pp.359~367 (1964)[DOI]
  118. J. Bardsley, "The development of a technique for extrusion and sintering of beryllia", J. Nucl. Mater, 14, pp.368~377 (1964)[DOI]
  119. TORY II-A: A Nuclear Ramjet Test Reactor, "J. W. Hadley", Lawrence Radiation Laboratory, University of California, ~, pp.Report UCRL-5484 (1959)
  120. M. J. Bannister, "The kinetics of sintering and grain growth of beryllia", J. Nucl. Mater, 14, pp.315~321 (1964)[DOI]

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