관성형 전자기식 작동기를 사용한 디스플레이 장비의 능동 진동제어 실험

Abstract

In this study, an active vibration control experiment was conducted on a display manufacturing system weighing approximately 15 tons. Three pneumatic shakers were installed underneath the equipment to excite the entire structure at three different frequencies. On the top side of the equipment, four inertial-type electromagnetic actuators capable of generating forces in the x, y, and z directions were mounted, enabling 12 degrees of freedom to be controlled. At locations near the actuators, four tri-axial accelerometers were installed to obtain 12 error signals. Vibrations at three distinct frequencies induced by the pneumatic shakers were measured at these 12 locations using the accelerometers. Active vibration control was performed by driving the inertial actuators using a narrow-band Fx-LMS algorithm to reduce the measured error signals. As a result of the control, the vertical vibration at 24 Hz was successfully reduced by 10.95 dB.