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Cross-Sectional Transmission Electron Microscopy Sample Preparation of Soldering Joint Using Ultramicrotomy

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초록

Solder/electroless nickel immersion gold (ENIG) joint sample which is comprised of dissimilar materials with different mechanical properties has limited the level of success in preparing thin samples for transmission electron microscopy (TEM). This short technical note reports the operation parameters for ultramicrotomy of solder joint sample and TEM analysis results. The solder joint sample was successfully sliced to 50~70 nm thick lamellae at slicing speed of 0.8~1.2 mm/s using a boat-type 45o diamond knife. Ultramicrotomy can be applied as a routine sample preparation technique for TEM analysis of solder joints.

Abstract

Solder/electroless nickel immersion gold (ENIG) joint sample which is comprised of dissimilar materials with different mechanical properties has limited the level of success in preparing thin samples for transmission electron microscopy (TEM). This short technical note reports the operation parameters for ultramicrotomy of solder joint sample and TEM analysis results. The solder joint sample was successfully sliced to 50~70 nm thick lamellae at slicing speed of 0.8~1.2 mm/s using a boat-type 45o diamond knife. Ultramicrotomy can be applied as a routine sample preparation technique for TEM analysis of solder joints.

참고문헌 (7)

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  2. Glanvill S R, "Ultramicrotomy of semiconductors and related materials", Microsc. Res. Tech, 31, pp.275~284 (1995)
  3. Howell D A, "Preparation of metal multilayer TEM cross-section using ultramicrotomy", J. Microsc, 180, pp.182~185 (1995)
  4. Hwang C W, "Interface microstructures between Ni-P plating and Sn-Ag-(Cu) lead-free solders", J. Mater. Res, 18, pp.2540~2543 (2003)
  5. Kang H B, "Initial interfacial reaction layers formed in Sn-3.5Ag solder", electroless Ni-P plated Cu substrate system, 2008, pp.23, 2195~2201
  6. Kang H B, "Microstructure of interfacial reaction layer in Sn-Ag-Cu", electroless Ni (P) solder joint, 2011, pp.22, 1308~1312
  7. Quintana C, "Ultramicrotomy for cross-sections of nanostructure", Micron, 28, pp.217~219 (1997)

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