Characterization of Two-Dimensional Transition Metal Dichalcogenides in the Scanning Electron Microscope Using Energy Dispersive X-ray Spectrometry, Electron Backscatter Diffraction, and Atomic Force Microscopy

Abstract

Here we show how by processing energy dispersive X-ray spectrometry (EDS) data obtained using highly sensitive, new generation EDS detectors in the AZtec LayerProbe software we can obtain data of sufficiently high quality to non-destructively measure the number of layers in two-dimensional (2D) MoS2 and MoS2/WSe2 and thereby enable the characterization of working devices based on 2D materials. We compare the thickness measurements with EDS to results from atomic force microscopy measurements. We also show how we can use electron backscatter diffraction (EBSD) to address fabrication challenges of 2D materials. Results from EBSD analysis of individual flakes of exfoliated MoS2 obtained using the Nordlys Nano detector are shown to aid a better understanding of the exfoliation process which is still widely used to produce 2D materials for research purposes.