Atomically sculptured heart in oxide film using convergent electron beam
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We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.
Abstract
We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.
참고문헌 (9)
- M. Altissimo, "E-beam lithography for micro-nanofabrication", Biomicrofluidics, 4(2), pp.026503~ (2010)
- W. Ehrfeld, "Deep X-ray lithography for the production of threedimensional microstructures from metals, polymers and ceramics", Radiat. Phys. Chem, 45(3), pp.349~365 (1995)
- S. Jesse, "Atomic-level sculpting of crystalline oxides: toward bulk nanofabrication with single atomic plane precision", Small, 11(44), pp.5895~5900 (2015)
- G. Lee, "Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO3", SrTiO3 system, 2017, pp.7(64), 40279~40285
- M. D. Levenson, "Improving resolution in photolithography with a phase-shifting mask", IEEE Trans. Electron Devices, 29(12), pp.1828~1836 (1982)
- 문선영, "Comprehensive Study on Critical Role of Surface Oxygen Vacancies for 2DEG Formation and Annihilation in LaAlO3", SrTiO3 Heterointerfaces, 2016, pp.12(2), 243~250[DOI]
- B. Song, "Atomicscale electron-beam sculpting of near-defect-free graphene nanostructures", Nano Lett, 11(6), pp.2247~2250 (2011)
- A. A. Tseng, "Electron beam lithography in nanoscale fabrication: recent development", IEEE Trans. Electron. Packaging Manuf, 26(2), pp.141~149 (2003)
- F. Watt, "Ion beam lithography and nanofabrication : a review", Int. J. Nanosci, 4(03), pp.269~286 (2005)