Structural and surface characteristics of TiO2 thin films grown by RF magnetron sputtering
0
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
Titanium dioxide (TiO2) thin films were deposited on Si(100) substrates with RF magnetron sputtering, and variations of their structural and surface characteristics with sputtering process condition were investigated. TiO2 films were grown as a polycrystalline state with mixed phase of anatase and rutile at room temperature. The grain size and surface roughness decreased with increase of O2 gas molar ratio in ambient mixed gas of Ar and O2 during film deposition. XPS results showed the chemical state and stoichiometry did not strongly depend on Ar/O2 ratio in ambient gas. The water contact angle of the film surface became larger as the grain size and surface roughness of the film decreased. It is considered that hydrophilicity of the TiO2 film depend mainly on surface morphology and roughness rather than crystalline structure and chemical state of the film.
Abstract
Titanium dioxide (TiO2) thin films were deposited on Si(100) substrates with RF magnetron sputtering, and variations of their structural and surface characteristics with sputtering process condition were investigated. TiO2 films were grown as a polycrystalline state with mixed phase of anatase and rutile at room temperature. The grain size and surface roughness decreased with increase of O2 gas molar ratio in ambient mixed gas of Ar and O2 during film deposition. XPS results showed the chemical state and stoichiometry did not strongly depend on Ar/O2 ratio in ambient gas. The water contact angle of the film surface became larger as the grain size and surface roughness of the film decreased. It is considered that hydrophilicity of the TiO2 film depend mainly on surface morphology and roughness rather than crystalline structure and chemical state of the film.
참고문헌 (34)
- H. Kim, , Appl. Phys. Lett, 69, pp.3860~3862 (1996)
- S. Tanemura, , Appl. Surf. Sci, 212-213, pp.654~660 (2003)
- P. B. Nair, , Appl. Surf. Sci, 257(24), pp.10869~10875 (2011)
- C. Martinet, , J. Non-Crystal. Solids, 216, pp.77~82 (1997)
- C. Euvananont, , Ceram. Int, 34(4), pp.1067~1071 (2008)
- A. Hadi, , Appl. Surf. Sci, 428, pp.1089~1097 (2018)
- S. Takeda, , Thin Solid Films, 39(2), pp.338~344 (2001)
- S. K. Kim, , Appl. Phys. Lett, 85, pp.4112~4114 (2004)
- A. Fujishima, , Nature, 238, pp.37~38 (1972)
- J. -G. Yu, , J. Phys. Chem. B, 107(50), pp.13871~13879 (2003)
- N. R. Mathews, , Solar Energy, 83(9), pp.1499~1508 (2009)
- S. Anandan, , ACS Appl. Mater. Interf, 5(1), pp.207~212 (2013)
- S. H. Oh, , Mater. Lett, 57(26-27), pp.4151~4155 (2003)
- 송요승, "Photocatalytic activity of TiO2 nanomaterials", Journal of Ceramic Processing Research, 17(11), pp.1197~1201 (2016), 청정에너지연구소[DOI]
- C. Yang, , Appl. Surf. Sci, 254(9), pp.2685~2689 (2008)
- G. Hyett, , J. Am. Chem. Soc, 128(37), pp.12147~12155 (2006)
- W. Wang, , J. Alloys Compounds, 708, pp.1195~1200 (2017)
- W. Yang, , Thin Solid Films, 515(4), pp.1708~1713 (2006)
- S. Kitazawa, , Thin Solid Films, 515(4), pp.1901~1904 (2006)
- S. Seeger, , Thin Solid Films, 605, pp.44~52 (2016)
- J. Singh, , Appl. Surf. Sci, 422, pp.953~961 (2017)
- S. Nezar, , Appl. Surf. Sci, 395, pp.172~179 (2017)
- A. R. G. Korpi, , Results in Physics, 7, pp.3349~3352 (2017)
- 박주훈, "RF magnetron sputter의 분위기에 따른 TiO2 박막의 특성", 한국결정성장학회지, 21(2), pp.65~69 (2011), 한국결정성장학회
- C. -H. Heo, , Thin Solid Films, 475, pp.183~188 (2005)
- J. -K. Kim, , J. Kor. Phys. Soc, 38, pp.19~ (2001)
- H. Tang, , J. Appl. Phys, 75, pp.2042~2047 (1994)
- A. Mills, , Photochem. Photobiol. A : Chem, 108, pp.1~35 (1997)
- D. A. H. Hanaor, , J. Mater. Sci, 46(4), pp.855~874 (2011)
- Sang-HunJeong, "Structural and Optical Properties of TiO2 Films Prepared Using Reactive RF Magnetron Sputtering", Journal of the Korean Physical Society, 41(1), pp.67~71 (2002), 한국물리학회
- S. K. Zheng, , Vacuum, 62(4), pp.361~366 (2001)
- S. Song, , Mater. Lett, 62(20), pp.3503~3505 (2008)
- T. Watanabe, , J. Ceram. Soc. Jpn, 117, pp.1285~1292 (2009)
- R. N. Wenzel, , Ind. Eng. Chem, 28, pp.988~ (1936)