Tailoring mechanical properties and wettability of nanocrystalline diamond films by control of sp2/sp3 bonding ratio
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The ratio of sp2 /sp3 bonded carbon in nanocrystalline diamond (NCD) films was controlled by Ar addition to the CH4/H2 mixtures and the effect of the sp2 /sp3 ratio on the mechanical/tribological properties and wettability was examined. Raman spectroscopy and XPS measurements revealed that Ar addition up to 45 sccm increases the sp2 /sp3 ratio and induces transition to NCD. Tribological properties such as friction coefficient and wear rate of the NCD film showed a strong dependence on the sp2 /sp3 bonded carbon ratio while hardness of the NCD films found to be closely related to the sp3 bond fraction rather than the sp2 /sp3 ratio. Wettability of the NCD films grown in the CH4/H2/Ar microwave plasmas found to be insensitive to the sp2 / sp3 ratio due to the non-negligible amount of hydrogen on the surfaces.
Abstract
The ratio of sp2 /sp3 bonded carbon in nanocrystalline diamond (NCD) films was controlled by Ar addition to the CH4/H2 mixtures and the effect of the sp2 /sp3 ratio on the mechanical/tribological properties and wettability was examined. Raman spectroscopy and XPS measurements revealed that Ar addition up to 45 sccm increases the sp2 /sp3 ratio and induces transition to NCD. Tribological properties such as friction coefficient and wear rate of the NCD film showed a strong dependence on the sp2 /sp3 bonded carbon ratio while hardness of the NCD films found to be closely related to the sp3 bond fraction rather than the sp2 /sp3 ratio. Wettability of the NCD films grown in the CH4/H2/Ar microwave plasmas found to be insensitive to the sp2 / sp3 ratio due to the non-negligible amount of hydrogen on the surfaces.
참고문헌 (27)
- J. Philip, , J. Appl. Phys, 93, pp.2164~2171 (2003)
- O. A. Williams, , Chem. Phys. Lett, 495, pp.84~89 (2010)
- A.V. Sumant, , Phys. Rev., 76, pp.235429~235429-11 (2007)
- G. Zilibotti, , Phys. Rev, 79, pp.075420~075420-10 (2009)
- A. V. Sumant, , Adv. Mater, 17, pp.1039~1045 (2005)
- W. H. Liao, , Nanoscale Res. Lett, 7, pp.82~89 (2012)
- D. T. Tran, , New Dia. & Frontier Carbon Technol, 16, pp.281~294 (2006)
- P. Bajaj, , Biomed. Devives, 9, pp.787~794 (2007)
- N. A. Moldovan, , Proc. SPIE, 4557, pp.288~298 (2001)
- W. Yang, , Nat. Mater, 1, pp.253~257 (2002)
- A. M. Kovalchenko, , Wear, 270, pp.325~331 (2011)
- D.S. Grierson, , Nanotoday, 2, pp.12~21 (2007)
- A.R. Konicek, , Phys. Rev. Lett, 100, pp.235502~235502-4 (2008)
- O. A. Williams, , Chem. Phys. Lett, 445, pp.255~258 (2007)
- D. Zhou, , J. Appl. Phys, 84, pp.1981~1989 (1998)
- H. J. Lee, , J. Phys. Chem. C, 116, pp.9180~9188 (2012)
- K. Panda, , Tribology International, 57, pp.124~136 (2013)
- K. Panda, , Surf. Coat. Technol, 207, pp.535~545 (2012)
- K. Panda, , J. Appl. Phys, 113, pp.094305~094305-9 (2013)
- P.W. May, , J. Appl. Phys, 101, pp.053115~053115-9 (2007)
- Y.C. Chu, , J. Appl. Phys, 112, pp.124307~124307-6 (2012)
- D. M. Gruen, , Appl. Phys. Lett, 68, pp.1640~1642 (1996)
- V. Janos, , Surf. Sci, 563, pp.183~190 (2004)
- D. Zhou, , J. Appl. Phys, 84, pp.1981~1989 (1998)
- M. Bai, , Thin Solid Films, 377-378, pp.138~147 (2000)
- L. Y. Ostrovskaya, , Diamond Relat. Mater, 14, pp.486~490 (2005)
- A. F. Azevedo, , Appl. Surf. Sci, 255, pp.6565~6570 (2009)