Structural and electrical properties of sol-gel prepared semiconducting YBa2Cu3O7-x thin films with varying coating numbers for uncooled infrared sensors
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Uncooled pyroelectric infrared based on semiconducting YBa2Cu3O7-x (YBCO) thin films have been investigated. YBCO precursor solutions were prepared by sol-gel method and YBCO films were fabricated by the spin coating method and structural and electrical properties with variation of coating number were studied. The crystal structure of the YBCO film annealed at 750 o C was polycrystalline tetragonal phase. The YBCO film coated with 5 times showed the average grain size of 75 nm and thickness of 185nm. Temperature resistance coefficient (TCR), responsivity and detectivity of the YBCO film sintered at 700 o C were −3%/o C, 43.42V/W and 5.34 × 106 cmHz1/2/W, respectively.
Abstract
Uncooled pyroelectric infrared based on semiconducting YBa2Cu3O7-x (YBCO) thin films have been investigated. YBCO precursor solutions were prepared by sol-gel method and YBCO films were fabricated by the spin coating method and structural and electrical properties with variation of coating number were studied. The crystal structure of the YBCO film annealed at 750 o C was polycrystalline tetragonal phase. The YBCO film coated with 5 times showed the average grain size of 75 nm and thickness of 185nm. Temperature resistance coefficient (TCR), responsivity and detectivity of the YBCO film sintered at 700 o C were −3%/o C, 43.42V/W and 5.34 × 106 cmHz1/2/W, respectively.
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