Preparation of Nano Sized Indium Tin Oxide (ITO) Powder with Average Particle Size Below 30 nm from Waste ITO Target by Spray Pyrolysis Process
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In this study, waste ITO target is dissolved into hydrochloric acid to generate a complex indium-tin chloride solution. Nano sized ITO powder with an average particle size below 30 nm are generated from these raw material solutions by spray pyrolysis process. Also, in this study, thermodynamic equations for the formation of indium-tin oxide (ITO) are established. As the reaction temperature increased from 800 o C to 900 o C, the proportion and size of the spherical droplet shape in which nano sized particles aggregated gradually decreased, and the surface structure gradually became densified. When the reaction temperature was 800 o C, the average particle size of the generated powder was about 20 nm, and no significant sintering was observed. At a reaction temperature of 900 o C, the split of the droplet was more severe than at 800 o C, and the rate of maintenance of the initial atomized droplet shape decreased sharply. The average particle size of the powder formed was about 25 nm. The ITO particles were com-posed of single solid crystals, regardless of reaction temperature. XRD analysis showed that only the ITO phase was formed. Remarkably, the specific surface area decreased by about 30% as the reaction temperature increased from 800°C to 900°C.
Abstract
In this study, waste ITO target is dissolved into hydrochloric acid to generate a complex indium-tin chloride solution. Nano sized ITO powder with an average particle size below 30 nm are generated from these raw material solutions by spray pyrolysis process. Also, in this study, thermodynamic equations for the formation of indium-tin oxide (ITO) are established. As the reaction temperature increased from 800 o C to 900 o C, the proportion and size of the spherical droplet shape in which nano sized particles aggregated gradually decreased, and the surface structure gradually became densified. When the reaction temperature was 800 o C, the average particle size of the generated powder was about 20 nm, and no significant sintering was observed. At a reaction temperature of 900 o C, the split of the droplet was more severe than at 800 o C, and the rate of maintenance of the initial atomized droplet shape decreased sharply. The average particle size of the powder formed was about 25 nm. The ITO particles were com-posed of single solid crystals, regardless of reaction temperature. XRD analysis showed that only the ITO phase was formed. Remarkably, the specific surface area decreased by about 30% as the reaction temperature increased from 800°C to 900°C.
참고문헌 (12)
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