UV/ozone 산화처리 및 화학적 식각공정을 적용한 그래핀 Grain Boundary 평가 방법
Evaluation Method for Graphene Grain Boundaryby UV/ozone-oxidation Chemical-etching Process
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초록
Chemical vapor deposited (CVD) polycrystalline graphene is widely used for various sensor application because of its extremelylarge surface-to-volume ratio. The electrical properties of CVD-graphene is significantly affected by the grain size and boundaries(GGBs), but evaluation of GGB of continuous monolayer graphene is difficult. Although several evaluation methods such as tunnelingelectron microscopy, confocal Raman, UV/ozone-oxidation are typically used, they still have issues in evaluation efficiency and accu-racy. In this paper, we suggest an improved evaluation method for precise and simple GGB evaluation which is based on UV/ozone-oxidation and chemical etching process. Using this method, we could observe clear GGBs of CVD-graphene layers grown by differentprocess conditions and statistically evaluate average grain sizes varying from 1.69 ~ 4.43µm. This evaluation method can be used foranalyzing the correlation between the electrical properties and grain size of CVD-graphene, which is essential for the development ofgraphene-based sensor devices.
Abstract
Chemical vapor deposited (CVD) polycrystalline graphene is widely used for various sensor application because of its extremelylarge surface-to-volume ratio. The electrical properties of CVD-graphene is significantly affected by the grain size and boundaries(GGBs), but evaluation of GGB of continuous monolayer graphene is difficult. Although several evaluation methods such as tunnelingelectron microscopy, confocal Raman, UV/ozone-oxidation are typically used, they still have issues in evaluation efficiency and accu-racy. In this paper, we suggest an improved evaluation method for precise and simple GGB evaluation which is based on UV/ozone-oxidation and chemical etching process. Using this method, we could observe clear GGBs of CVD-graphene layers grown by differentprocess conditions and statistically evaluate average grain sizes varying from 1.69 ~ 4.43µm. This evaluation method can be used foranalyzing the correlation between the electrical properties and grain size of CVD-graphene, which is essential for the development ofgraphene-based sensor devices.
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