나노 블록공중합체 템플레이트에 ALD로 제조된 센서용TiO2 박막의 미세구조 연구
Microstructure of TiO2 sensor electrode on nano block copolymertemplates using an ALD
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초록
We fabricated nano-templates by low temperature BCP(block copolymer) process at 180℃, then we deposited 10 nm- thick TiO2 layers with ALD(atomic layer deposition) at low temperature of 150℃. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder- type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after TiO2-ALD processing, we confirmed the deposition of the uniform nano layers of TiO2 on the nano-templates. Through AFM analysis, the pitches of the crest- through(in groove-type) and hole-hole(in cylinder-type) were the same before and after TiO2-ALD processing. In addition, we indirectly determined the existence of the uniform TiO2 layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano- structure for sensor application could be achieved by TiO2-ALD processing at extremely low temperature of 150℃.
Abstract
We fabricated nano-templates by low temperature BCP(block copolymer) process at 180℃, then we deposited 10 nm- thick TiO2 layers with ALD(atomic layer deposition) at low temperature of 150℃. Through FE-SEM analysis, we confirmed the successful formation of the groove-type(width of crest : 30 nm, width of trough : 18 nm) and the cylinder- type(diameter : 10 nm, distance between hole : 25 nm) templates. Moreover, after TiO2-ALD processing, we confirmed the deposition of the uniform nano layers of TiO2 on the nano-templates. Through AFM analysis, the pitches of the crest- through(in groove-type) and hole-hole(in cylinder-type) were the same before and after TiO2-ALD processing. In addition, we indirectly determined the existence of the uniform TiO2 layers on nano-templates as the surface roughness decreased drastically. We successfully fabricated nano-template at low temperature and confirmed that the three-dimensional nano- structure for sensor application could be achieved by TiO2-ALD processing at extremely low temperature of 150℃.
참고문헌 (10)
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