본문 바로가기
KERD
논문KCI 등재

ZnO 기반 NO2 가스센서의 MgZnO와 MgO을 통한 성능 향상에 대한 연구

Study on the Performance Improvement of ZnO-based NO2 Gas Sensor through MgZnO and MgO

1

조회

0

다운로드

1

인용

0

참고문헌

키워드

주제분류공학일반

초록

Brush-like ZnO hierarchical nanostructures decorated with MgxZn1-xO (x = 0.1, 0.2, 0.3, 0.4, and 0.5) were fabricated and examined for application to a gas sensor. They were synthesized using vapor phase growth (VPG) on indium tin oxide (ITO) substrates. To generate electronic accumulation at ZnO surface, MgZnO nanoparticles were prepared by sol-gel method, and the ratio of Mg and Zn was adjusted to optimize the device for NO2 gas detection. As the electrons in the accumulation layer generated by the heterojunction reacted faster and more frequently with the gas, the sensitivity and speed improved. When tested as sensing materials for gas sensors at 100 ppm NO2 at 300oC, these MgZnO decorated ZnO nanostructures exhibited an improvement from 165 to 514 times compared to pristine ZnO. The response and recovery time of the MgZnO decorated ZnO samples were shorter than those of the pristine ZnO. Various analyzing techniques, including field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray powder diffraction (XRD) were employed to confirm the growth morphology, atomic composition, and crystalline information of the samples, respectively.

Abstract

Brush-like ZnO hierarchical nanostructures decorated with MgxZn1-xO (x = 0.1, 0.2, 0.3, 0.4, and 0.5) were fabricated and examined for application to a gas sensor. They were synthesized using vapor phase growth (VPG) on indium tin oxide (ITO) substrates. To generate electronic accumulation at ZnO surface, MgZnO nanoparticles were prepared by sol-gel method, and the ratio of Mg and Zn was adjusted to optimize the device for NO2 gas detection. As the electrons in the accumulation layer generated by the heterojunction reacted faster and more frequently with the gas, the sensitivity and speed improved. When tested as sensing materials for gas sensors at 100 ppm NO2 at 300oC, these MgZnO decorated ZnO nanostructures exhibited an improvement from 165 to 514 times compared to pristine ZnO. The response and recovery time of the MgZnO decorated ZnO samples were shorter than those of the pristine ZnO. Various analyzing techniques, including field-emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDS), and X-ray powder diffraction (XRD) were employed to confirm the growth morphology, atomic composition, and crystalline information of the samples, respectively.

참고문헌 (26)

  1. S. Munirathinam, "Chapter Six-Industry 4. 0 : Industrial Internet of Things(IIOT)", Adv. Comput, 117, pp.129~164 (2020)
  2. I. H. Khan, "Role of Internet of Things(IoT)in Adoption of Industry 4. 0", J. Ind. Integr. Manag, 6(2), pp.1~19 (2021)
  3. A. Mirzaei, "Detection of hazardous volatile organic compounds(VOCs)by metal oxide nanostructures-based gas sensors : A review", Ceram. Int, 42(14), pp.15119~15141 (2016)
  4. M. Kampa, "Human health effects of air pollution", Environ. Pollut, 151(2), pp.362~367 (2008)
  5. A. Dey, "Semiconductor metal oxide gas sensors : A review", Mater. Sci. Eng. B-Adv. Funct. Solid-State Mater, 229, pp.206~217 (2018)
  6. N. Yamazoe, "Oxide semiconductor gas sensors", Catal. Surv. Asia, 7(1), pp.63~75 (2003)
  7. 김윤화, "실내 대기질 진단을 위한 금속산화물 기반 폼알데하이드 가스센서 연구 동향", 센서학회지, 28(6), pp.377~384 (2019), 한국센서학회
  8. S. Yang, "Metal Oxide Based Heterojunctions for Gas Sensors : A Review", Nanomater, 11(4), pp.1026~ (2021)
  9. G. Korotcenkov, "Metal Oxides for Application in Conductometric Gas Sensors : How to Choose?", Solid State Phenomena, 266, pp.187~195 (2017)
  10. H. J. Kim, "Highly sensitive and selective gas sensors using p-type oxide semiconductors : Overview", Sens. Actuator B-Chem, 192, pp.607~627 (2014)
  11. V. Kobrinsky, "Tailoring the gas sensing properties of ZnO thin films through oxygen nonstoichiometry", Appl. Phys. Lett, 93(11), pp.113502~ (2008)
  12. D. R. Miller, "Nanoscale metal oxide-based heterojunctions for gas sensing : A review", Sens. Actuator B-Chem, 204, pp.250~272 (2014)
  13. L. Wang, "ZnO nanorod gas sensor for ethanol detection", Sens. Actuator B-Chem, 162(1), pp.237~243 (2012)
  14. N. Yamazoe, "Toward innovations of gas sensor technology", Sens. Actuator B-Chem, 108(1-2), pp.2~14 (2005)
  15. H. R. Kim, "Highly sensitive and ultra-fast responding gas sensors using self assembled hierarchical SnO2 spheres", Sens. Actuator BChem, 136(1), pp.138~143 (2009)
  16. A. Z. Sadek, "Characterization of ZnO NanobeltBased Gas Sensor for H2, NO2, and Hydrocarbon Sensing", IEEE Sens. J, 7(6), pp.919~924 (2007)
  17. G. Zhu, "Hierarchical NiO hollow microspheres assembled from nanosheet-stacked nanoparticles and their application in a gas sensor", RSC Adv, 2(10), pp.4236~4241 (2012)
  18. F. Liu, "A Catalyzed-Growth Route to Directly Form Micropatterned WO2 and WO3 Nanowire Arrays with Excellent Field Emission Behaviors at Low Temperature", Cryst. Growth Des, 12(1), pp.7~17 (2004)
  19. R. L. V. Wal, "Synthesis Methods, Microscopy Characterization and Device Integration of Nanoscale Metal Oxide Semiconductors for Gas Sensing", Sensors, 9(10), pp.7866~7902 (2009)
  20. D. Calestani, "Growth of ZnO tetrapods for nanostructure-based gas", Sens. Actuator BChem, 144(2), pp.472~478 (2010)
  21. S. W. Choi, "Dual Functional Sensing Mechanism in SnO2–ZnO Core–Shell Nanowires", ACS Appl. Mater. Interfaces, 6, pp.8281~8287 (2014)
  22. V. Kumar, "Copper doped SnO2 nanowires as highly sensitive H2S gas sensor", Sens. Actuator B-Chem, 138(2), pp.587~590 (2009)
  23. D. Zappa, "Metal oxide-based heterostructures for gas sensors-A review", Anal. Chim. Acta, 1039, pp.1~23 (2018)
  24. H. Dislich, "Sol-gel : Science, processes and products", J. Non-Cryst. Solids, 80(1-3), pp.115~121 (1986)
  25. B. Sarikavak-Lisesivdin, "Numerical optimization of twodimensional electron gas in Mgx Zn1−x O", ZnO heterostructures(0. 10<x<0. 30), 2013, pp.93(9), 1124~1131
  26. T. C. Zhang, "Visible-blind ultraviolet photodetector based on double heterojunction of n-ZnO", insulator-MgO⁄p-Si, 2009, pp.94(11), 113508~

관련 논문AI추천

이 간행물의 다른 논문 (15건)