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산화물 반도체형 가스센서의 선택성 향상을 위한 필터 연구 동향 및 전략

Recent Advances and Trends in Filters for Highly Selective Metal Oxide Gas Sensors

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초록

Metal-oxide-based semiconductor gas sensors are widely used because of their advantages, such as high response and simple sensingmechanism. Recently, with the rapid progress in sensor networks, computing power, and microsystem technology, sensor applicationsare expanding to various fields, such as food quality control, environmental monitoring, healthcare, and artificial olfaction. Therefore,the development of highly selective gas sensors is crucial for practical applications. This article reviews the developments in novel sensordesign consisting of sensing films and physical and chemical filters for highly selective gas sensing. Unlike conventional sensors,the sensor structures with filters can separate the sensing and catalytic reactions into independent processes, enabling selective and sensitivegas sensing. The main objectives of this study are directed at introducing the role of various filters in gas-sensing reactions andpromising sensor applications. The highly selective gas sensors combined with a functional filter can open new pathways toward theadvancement of high-performance gas sensors and electronic noses.

Abstract

Metal-oxide-based semiconductor gas sensors are widely used because of their advantages, such as high response and simple sensingmechanism. Recently, with the rapid progress in sensor networks, computing power, and microsystem technology, sensor applicationsare expanding to various fields, such as food quality control, environmental monitoring, healthcare, and artificial olfaction. Therefore,the development of highly selective gas sensors is crucial for practical applications. This article reviews the developments in novel sensordesign consisting of sensing films and physical and chemical filters for highly selective gas sensing. Unlike conventional sensors,the sensor structures with filters can separate the sensing and catalytic reactions into independent processes, enabling selective and sensitivegas sensing. The main objectives of this study are directed at introducing the role of various filters in gas-sensing reactions andpromising sensor applications. The highly selective gas sensors combined with a functional filter can open new pathways toward theadvancement of high-performance gas sensors and electronic noses.

참고문헌 (39)

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