화학기상공정을 이용한 나노질화알루미늄 분말 합성
Synthesis of Nano-size Aluminum Nitride Powders by Chemical Vapor Process
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초록
Aluminum nitride (AlN) powders were prepared by the chemical vapor synthesis (CVS) process in the AlCl₃-NH₃-N₂ system. Aluminum chloride (AlCl₃) as the starting material was gasified in the heating chamber of 300℃. Aluminum chloride gas transported to the furnace in NH3-N2 atmosphere at the gas flow rate of 200-400 ml/min. For samples synthesized between 700 and 1200℃, the XRD peaks corresponding to AlN were comparatively sharp and also showed an improvement of crystallinity with increasing the reaction temperature. In additions, the average particle size of the AlN powders decreased from 250 to 40 nm, as the reaction temperature increased.
Abstract
Aluminum nitride (AlN) powders were prepared by the chemical vapor synthesis (CVS) process in the AlCl₃-NH₃-N₂ system. Aluminum chloride (AlCl₃) as the starting material was gasified in the heating chamber of 300℃. Aluminum chloride gas transported to the furnace in NH3-N2 atmosphere at the gas flow rate of 200-400 ml/min. For samples synthesized between 700 and 1200℃, the XRD peaks corresponding to AlN were comparatively sharp and also showed an improvement of crystallinity with increasing the reaction temperature. In additions, the average particle size of the AlN powders decreased from 250 to 40 nm, as the reaction temperature increased.
참고문헌 (8)
- G. A. Slack, "Journal of Phys", Chem. Solid, 34, pp.321~ (1973)
- Lokesh Chandra Pathak, , Journal of Am. Ceram. Soc, 82, pp.257~ (1999)
- Renli Fu, , Mater. Lett, 59, pp.2605~ (2005)
- Yu Qiu, , Journal of Eur. Ceram. Soc, 23, pp.2015~ (2003)
- K. G. Nickel, , Journal of Am. Ceram. Soc, 72, pp.1804~ (1989)
- J. R. Park, , Journal of Mater. Sci, 28, pp.57~ (1993)
- Tomohiro Yamakawa, , Journal of Am. Ceram. Soc, 89, pp.171~ (2006)
- M.-C. Wang, , Journal of Cry Growth, 216, pp.69~ (2000)