High Shock-Resistant Design of Piezoresistive High-g Accelerometer
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초록
To improve the shock-resistance of piezoresistive high-g accelerometer, we propose a design of piezoresistivehigh-g accelerometer. The accelerometer employs special-shaped proof masses system with a cross gap. Fourtiny sensing beams are bonded above the cross gap. The expression of the deformation, natural frequency anddamping is deduced, and the structural parameters are optimized. The accelerometer structure is simulated andverified by finite element method (FEM) simulation. The results show that the range of the accelerometer canreach 200,000 g, the natural frequency is 453.6 kHz, and the cross-axis sensitivity of X-axis and Y-axis is0.25% and 0.11%, respectively, which can apply to the measurement of high shock. Contrastively, the crossaxissensitivity of X-axis and Y-axis is respectively, reduced by 93.2% and 96.9%. The sensitivity of ouraccelerometer is 0.88 μV/g. It is of great value for the application of piezoresistive high-g accelerometer withhigh shock-resistance.
Abstract
To improve the shock-resistance of piezoresistive high-g accelerometer, we propose a design of piezoresistivehigh-g accelerometer. The accelerometer employs special-shaped proof masses system with a cross gap. Fourtiny sensing beams are bonded above the cross gap. The expression of the deformation, natural frequency anddamping is deduced, and the structural parameters are optimized. The accelerometer structure is simulated andverified by finite element method (FEM) simulation. The results show that the range of the accelerometer canreach 200,000 g, the natural frequency is 453.6 kHz, and the cross-axis sensitivity of X-axis and Y-axis is0.25% and 0.11%, respectively, which can apply to the measurement of high shock. Contrastively, the crossaxissensitivity of X-axis and Y-axis is respectively, reduced by 93.2% and 96.9%. The sensitivity of ouraccelerometer is 0.88 μV/g. It is of great value for the application of piezoresistive high-g accelerometer withhigh shock-resistance.
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