탄소 나노튜브의 성장 및 후처리 조건에 따른 이산화질소 감지특성의 변화
The Change of NO2 Sensing Characteristics for Carbon Nanotubes with Growth and Post Treatment Conditions
1
조회
0
다운로드
0
인용
0
참고문헌
초록
CVD 및 PECVD법으로 탄소 나노튜브를 성장하고, 그 후 400∼500℃에서 산화 열처리한 센서의 이산화질소 감지특성을 200℃ 및 1.5ppm의 이산화질소 농도 하에서 측정하였다. 탄소 나노튜브 센서의 전기저항은 온도 증가에 따라 감소하는 반도체 특성을 보였으며, 이산화질소 흡착에 따라 전기저항은 감소하였다. 공기 중의 수분은 센서감도에 영향을 주고 있으며, 센서를 마이크로파에 3분간 노출하면 센서의 특성은 저하되었다. 또한 CVD법으로 제조한 시편에 비하여 PECVD법으로 성장한 탄소 나노튜브 센서의 감도는 향상 되었다.
Abstract
Carbon nanotubes (CNT) grown by chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD), and followed by annealing at 400~500C were investigated for gas sensing under 1.5ppm NO concentration at an operating temperature of 200C. The electrical resistance of CNT sensor decreased with temperature, indicating a semiconductor type. The resistance of CNT sensor decreased with NO adsorption. It was found that the sensitivity of sensor was affected by humidity and decreased under microwave irradiation for 3 minutes. The CNT sensor grown by PECVD had a higher sensitivity than that of CVD.
참고문헌 (14)
- "Nanocrystalline Tungsten Oxide NO Sensor", B 94(343) (2003)
- "Enviromental Gas Sensing", 20, pp.95~ (1994)
- "Extreme Oxygen Sensitivity of Electronic Properties of Carbon Nanotubes", 287(1801) (2001)
- "Gas Adsorption in the Inside and Outside of Single Walled Carbon Nanotubes", 336(205) (2001)
- "Effects of Oxygen Annealing on Gas Sensing Properties of Carbon Nanotube Thin Films", 436(95) (2003)
- "Interaction of Methane with Carbon Nanotube Thin Films Role of Defects and Oxygen Adsorption", C 24(527) (2004)
- "탄소 나노튜브를 이용한 이산화질소 감지 센서의 특성", 12(3), pp.227~ (2005)
- "Application of Carbon Nanotubes", pp.391~425 (2000), Springe
- "High Sensitivity NO Sensors for Enviromental Monitoring Produced Using Laser Ablated Nanocrystalline Metal Oxides'", B 85(239) (2002)
- "Sensitivity Analysis to NH3 Ethanol and Humidity of Carbon Nanotubes Thin Film Prepared by PECVD", B 95(195) (2003)
- "Effects of HO Adsorption on the Electrical Transport Properties of Double-walled Carbon Nanotubes", 44(2155) (2006)
- "Nanotubes in Microwave Fields: Light Emission, Intense Heat, Outgassing and Reconstruction", 15(3969) (2003)
- "Microwave-assisted Single-step Functionalization and in situ Derivatization of Carbon Nanotubes with Gold Nanoparticles", 18(1390) (2006)
- "Characterization Methods od Carbon Nanotubes : a Review", B 119(105) (2005)