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Pulsed Magnetron Sputtering Deposition of DLC Films Part I : Low-Voltage Bias-Assisted Deposition
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Pulsed Magnetron Sputtering Deposition of DLC FilmsPart II: High-voltage Bias-assisted DepositionAlexanderN.Zakharov, Hui-GonChun, KonstantinV.Oskomov, NikolayS.Sochugov, Tong-YulCho한국표면공학회 · 한국표면공학회지2003 · 제36권 제2호Diamond-Like Carbon Films Deposited by Pulsed Magnetron Sputtering System with Rotating CathodeHui-GonChun, KonstantinV.Oskomov, NikolayS.Sochugov, SergeyV.Rabotkin, Yong-ZooYou한국표면공학회 · 한국표면공학회지2003 · 제36권 제4호a-C:H Films Deposited in the Plasma of Surface Spark Discharge at Atmospheric Pressure. Part I: Experimental InvestigationHui-GonChun, Jing-HyukLee, K.V.Oskomov, N.S.Sochugov, Yong-ZooYou한국표면공학회 · 한국표면공학회지2003 · 제36권 제5호Microstructural characteristics and film properties of diamond-like carbon coatings grown by PECVDKeun Ho Auh, Koichi Niihara, Won Jae Yang청정에너지연구소 · Journal of Ceramic Processing Research2004 · 제5권 제3호Characteristics of diamond-like nanocomposite films grown by plasma enhanced chemical vapor depositionKeunHoAuh, WonJaeYang한국결정성장학회 · 한국결정성장학회지2003 · 제13권 제1호Microstructure and Physical Properties of Sputtered Metal Doped Nanocrystalline Structured Carbon Coatings김성일, 한전건한국표면공학회 · 한국표면공학회지2007 · 제40권 제2호
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