원자층 증착법에 의한 TiO2, Al2O3, 및 TiO2-Al2O3 나노라미네이트 박막이 316L Stainless Steel의 부식특성에 미치는 영향
Corrosion Properties of Atomic Layer Deposited TiO2, Al2O3 and TiO2-Al2O3 Nanolaminated Film Coated 316L Stainless Steel
1
조회
0
다운로드
0
인용
0
참고문헌
키워드
초록
TiO2, Al2O3, and TiO2-Al2O3 nanolaminated films were grown by atomic layer deposition (ALD) on the 316L stainless steel (SS316L) substrates at a temperature of 150 ºC. The growth kinetics of ALD-TiO2 and Al2O3 thin films were systematically investigated in order to precisely control the thickness of each layers in the TiO2-Al2O3 nanolaminated films using a high-resolution transmission electron microscopy. And, the exact deposition rates of ALD-TiO2 on Al2O3 surface and ALD-Al2O3 on TiO2 surface were revealed to be 0.0284 nm/cycle and 0.11 nm/cycle, respectively. At given growth conditions, the microstructures of TiO2, Al2O3 and TiO2-Al2O3 nanolaminated films were amorphous. The potentiodynamic polarization test revealed that the TiO2-Al2O3 nanolaminated film coated SS316L had a best corrosion resistance, although all ALDcoated SS316L exhibited a clear improvement of the corrosion resistance compared with a bare SS316L.
Abstract
TiO2, Al2O3, and TiO2-Al2O3 nanolaminated films were grown by atomic layer deposition (ALD) on the 316L stainless steel (SS316L) substrates at a temperature of 150 ºC. The growth kinetics of ALD-TiO2 and Al2O3 thin films were systematically investigated in order to precisely control the thickness of each layers in the TiO2-Al2O3 nanolaminated films using a high-resolution transmission electron microscopy. And, the exact deposition rates of ALD-TiO2 on Al2O3 surface and ALD-Al2O3 on TiO2 surface were revealed to be 0.0284 nm/cycle and 0.11 nm/cycle, respectively. At given growth conditions, the microstructures of TiO2, Al2O3 and TiO2-Al2O3 nanolaminated films were amorphous. The potentiodynamic polarization test revealed that the TiO2-Al2O3 nanolaminated film coated SS316L had a best corrosion resistance, although all ALDcoated SS316L exhibited a clear improvement of the corrosion resistance compared with a bare SS316L.
참고문헌 (21)
- U. R. Evans, "Electrochemical mechanism of atmospheric rusting", Nature, 206, pp.980~982 (1965)
- C. X. Shan, "Corrosion resistance of TiO2 films grown on stainless steel by atomic layer deposition", Surf. Coat. Technol, 202, pp.2399~2402 (2008)
- M. Atik, "Sol-gel TiO2-SiO2 films as protective coatings against corrosion of 316L stainless steel in H2SO4 solutions", J. Appl. Electrochem, 25, pp.142~148 (1995)
- S.E.Potts, "Ultra-Thin aluminium oxide films deposited by plasmaenhanced atomic layer deposition for corrosion protection", J. Electrochem. Soc, 158, pp.C132~C138 (2011)
- R. Hofman, "FTIR and XPS studies on corrosion-resistant SiO2 coatings as a function of the humidity during deposition", Surf. Interface Anal, 24, pp.1~6 (1996)
- R.Matero, "Atomic layer deposited thin films for corrosion profection", J. Phys. IV France, 9, pp.Pr8-493~Pr8-499 (1999)
- E. Marin, "Multilayer Al2O3", TiO2 Atomic layer deposition coatings for the corrosion protection of stainless steel, 2012, pp.522, 283~288
- E.Härkönen, "Corrosion protection of steel with oxide nanolaminates grown by atomic layer deposition", J. Electrochem. Soc, 158, pp.C369~C378 (2011)
- S. K. Tiwari, "Development of conversion coating on mild steel prior to sol gel nanostructured Al2O3coating for enhancement of corrosion resistance", Surf. Coat. Technol, 205, pp.4960~4967 (2011)
- Y. Muroya, "Densification of SiO2-Al2O3-TiO2 based ceramic film coated on steel for high thermal stabilty and mechanical properties", Surf. Coat. Technol, 201, pp.880~885 (2006)
- D. Pech, "Electrochemical behaviour enhancement of stainless steels by a SiO2 PACVD coating", Corros. Sci, 50, pp.1492~1497 (2008)
- S. H. Ahn, "A study on corrosion resistance characteristics of PVD Cr-N coated steels by electrochemical method", Surf. Coat. Technol, 150, pp.319~326 (2002)
- Chenglong Liu, "In vitro corrosion behavior of multilayered Ti", TiN coating on biomedical AISI 316L stainless steel, 2006, pp.200, 4011~4016
- B. Díaz, "Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel", Electrochim. Acta, 56, pp.10516~10523 (2011)
- Xuguo Huai, "Corrosion resistance of Al2O3 coating on a steel substrate", Journal of Ceramic Processing Research, 10(5), pp.618~620 (2009), 세라믹공정연구센터
- L. Bamoulid, "An efficient protection of stainless steel against corrosion:Combination of a conversion layer and titanium dioxide deposit", Surf. Coat. Technol, 202, pp.5020~5026 (2008)
- M. Marin, "Longterm performance of atomic layer deposition coatings for corrosion protection of stainless steel", Mater. Corros, 66, pp.907~914 (2015)
- J.H.Kim, "Film growth model of atomic layer deposition for multicomponent thin films", J. Appl. Phys, 97, pp.093505-01~093505-05 (2005)
- B. S. Boroujeny, "Design and investigation of TiO2-SiO2 thin films on AISI 316L stainless steel for tribological properties and corrosion protection", J. Adv. Mater. and Proc, 4, pp.3~14 (2016)
- D. S. R. Krishna, "Magnetron sputtered TiO2 films on a stainless steel substrate:Selective rutile phase formation and its tribological and anti-corrosion performance", Thin Solid Films, 519, pp.4860~4864 (2011)
- W.M.Haynes, "CRC Handbook of Chemistry and Physics" (2015), CRC Press