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이온빔 처리된 폴리머 표면의 자가나노구조화를 이용한 반사방지 필름 제조용 소프트 몰드 임프린팅 연구

Soft Mold Imprinting Fabrication of Anti-reflection Film using Self-Organized Nanostructure Polymer Surfaces Irradiated by Ion Beams

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키워드

주제분류기계공학

초록

Soft mold imprinting method that uses nanostructured polymer mold was investigated for anti-reflection film fabrication. The nanostructured soft mold was polyethylene terephthalate(PET) irradiated by oxygen ion beams. The collisional energy transfer between oxygen ion and the polymer surface induced cross-linking and scission reactions, resulting in self-organized nanostructures with regular patterns of the wavenumber of 5 μm-1. Post processes including ultra-violet curable resin coating and delamination fabricated anti-reflection films. The imprinted resin surface also showed the consistent wavenumber, 5 μm-1. Pristine PET, oxygen ion beam treated PET, and imprinted replica sample showed total transmittance of 91.04, 93.25, and 93.57- 93.88%, respectively.

Abstract

Soft mold imprinting method that uses nanostructured polymer mold was investigated for anti-reflection film fabrication. The nanostructured soft mold was polyethylene terephthalate(PET) irradiated by oxygen ion beams. The collisional energy transfer between oxygen ion and the polymer surface induced cross-linking and scission reactions, resulting in self-organized nanostructures with regular patterns of the wavenumber of 5 μm-1. Post processes including ultra-violet curable resin coating and delamination fabricated anti-reflection films. The imprinted resin surface also showed the consistent wavenumber, 5 μm-1. Pristine PET, oxygen ion beam treated PET, and imprinted replica sample showed total transmittance of 91.04, 93.25, and 93.57- 93.88%, respectively.

참고문헌 (13)

  1. K Choi, "Nano-tailoring the surface structure for the monolithic highperformance antireflection polymer film", Adv. Mater, 22, pp.3713~3718 (2010)
  2. P Lalanne, "Antireflection behavior of silicon subwavelength periodic structures for visible light", Nanotechnology, 8, pp.53~ (1997)
  3. K Nakamura, "Anti-glare and anti-reflection film, polarizing plate, and image display device", U.S. Patent No. 6,693,746, ~ (2004)
  4. K-S Han, "Enhanced performance of solar cells with antireflection layer fabricated by nano-imprint lithography", Sol. Energy Mater. Sol. Cells, 95, pp.288~291 (2011)
  5. J Zhang, "Lowcost fabrication of large area sub-wavelength antireflective structures on polymer film using a soft PUA mold", Opt. Express, 22, pp.1842~1851 (2014)
  6. M C Coen, "Modification of the micro-and nanotopography of several polymers by plasma treatments", Appl. Surf. Sci, 207, pp.276~286 (2003)
  7. J Yun, "Interface between oxide coatings and plasmadamaged polymers and its effects on coating adhesion and structure", Plasma Process. Polym, 9, pp.135~148 (2012)
  8. S Lee, "Ar and O2 linear ion beam PET treatments using an anode layer ion source", Curr. Appl. Phys, 14, pp.S180~S182 (2014)
  9. C Böhm, "Retarding-field analyzer for measurements of ion energy distributions and secondary electron emission coefficients in lowpressure radio frequency discharges", Rev. Sci. Instrum, 64, pp.31~44 (1993)
  10. J Cai, "Recent advances in antireflective surfaces based on nanostructure arrays", Mater. Horizons, 2, pp.37~53 (2015)
  11. J F Ziegler, "The stopping and range of ions in matter", Nucl. Instruments Methods Phys. Res. Sect. B Beam Interact. with Mater. Atoms, 268, pp.1818~1823 (2010)
  12. A Hössinger, "Simulation of ion implantation for ULSI technology", pp.2000
  13. D F McMillen, "Hydrocarbon bond dissociation energies", Annu. Rev. Phys. Chem, 33, pp.493~532 (1982)

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