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나노임프린트 리소그래피와 유연 PVA 템플릿을 이용한 렌즈 표면 moth-eye 패턴 형성에 관한 연구

Fabrication of Moth-Eye Pattern on a Lens Using Nano Imprint Lithography and PVA Template

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주제분류기계공학

초록

Antireflection pattern, moth-eye structure, was fabricated on lens using Ultra Violet nanoimprint lithography and flexible template. Ni template with conical shaped structure was used as a master template to molding. The flexible poly vinyl alcohol template was fabricated by molding. This poly vinyl alcohol template was used as an imprint template of imprint at lens. Using Ultra Violet nanoimprint lithography and poly vinyl alcohol template, polymer based moth-eye structure was formed on lens and its transmittance was increased up to 94% from 92% at 550 nm wavelength.

Abstract

Antireflection pattern, moth-eye structure, was fabricated on lens using Ultra Violet nanoimprint lithography and flexible template. Ni template with conical shaped structure was used as a master template to molding. The flexible poly vinyl alcohol template was fabricated by molding. This poly vinyl alcohol template was used as an imprint template of imprint at lens. Using Ultra Violet nanoimprint lithography and poly vinyl alcohol template, polymer based moth-eye structure was formed on lens and its transmittance was increased up to 94% from 92% at 550 nm wavelength.

참고문헌 (9)

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  6. K.-S. Han, , Appl. Phys. Lett, 91, pp.123118~ (2007)
  7. S.-Y. Hwang, , Microelectron. Eng.
  8. S.-H. Hong, , Microelectron. Eng.
  9. J. Y. Hwang, , Nanotechno.

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