폴리실리콘용 유동층 반응기에서 탄화규소의 내구성과 적합성 연구
Endurance and Compatibility of Silicon Carbide as Fluidized Bed Reactor for Poly-silicon
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In order to utilize silicon carbide (SiC) as an inner part of fluidized bed reactor (FBR) for manufacturing poly-silicon, we have carried out the thermodynamic calculation on the overall reactions including poly-silicon synthesis and compatibility of SiC with FBR process. The resources of silicon included SiH4(MS), SiHCl3(TCS) and SiCl4(STC) and the thermodynamic yield of the FBR with MS, TCS and STC were compared each other with variable range of temperature, pressure and hydrogen to silicon ratio. The silicon yield of MS, TCS and STC were 100%, 28% and 4%, respectively, throughout the conventional FBR conditions. Silicon carbide having high hardness and strength showed strong resistance to granule collisions during the FBRprocess using a lab-scale reactor. And it also showed quite good compatibility with the typical FBR processesof MS and TCS resources.
Abstract
In order to utilize silicon carbide (SiC) as an inner part of fluidized bed reactor (FBR) for manufacturing poly-silicon, we have carried out the thermodynamic calculation on the overall reactions including poly-silicon synthesis and compatibility of SiC with FBR process. The resources of silicon included SiH4(MS), SiHCl3(TCS) and SiCl4(STC) and the thermodynamic yield of the FBR with MS, TCS and STC were compared each other with variable range of temperature, pressure and hydrogen to silicon ratio. The silicon yield of MS, TCS and STC were 100%, 28% and 4%, respectively, throughout the conventional FBR conditions. Silicon carbide having high hardness and strength showed strong resistance to granule collisions during the FBRprocess using a lab-scale reactor. And it also showed quite good compatibility with the typical FBR processesof MS and TCS resources.
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