금속 패터닝 기반 고투과성 산화물 투명전극 설계
Design of Transparent Conductive Oxides with Metal Patterning Techniques
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Transparent electrodes overcome the limitations of opaque electrodes by allowing visible light to pass through, which facilitates their application in various fields such as transparent photovoltaics, displays, and smart windows. Particularly, transparent electrodes that are more effective in terms of transmittance are useful and structurally flexible. In this study, an efficient approach is proposed for designing transparent conductive oxides with improved transmittance. The oxide/metal/oxide (OMO) structure exhibits outstanding transparency and electrical conductivity. Therefore, a patterned OMO structure was proposed, in which metal oxides and patterned metal layers are deposited. The improvement in the transmittance and the effective resistance by through the patterned structure applied to the metal layer of the OMO structure was confirmed. Patterning the metal layer enabled the superimposition of light absorption, reflection, and scattering effects, which resulted in enhanced optical transparency while maintaining remarkable electrical conductivity. To confirm the transmittance and electrical conductivity of the patterned OMO structure, two types of patterned structures were designed: stripe and hole. These patterned OMO structures exhibit excellent optical transmittances of 73.94% and 74.51%, showcasing an improvement of over 8% compared with the planar OMO structure. Sheet resistance is also significantly affected via pattern designs, reaching 2.15 Ω/□ of striped- pattern and 2.11 Ω/□ of hole-pattern. This suggests that transparent conductive oxides of metal patterning is highly effective to improve the optical and electrical features to be adopted in transparent photovoltaics, energy utilities, and transparent devices.
Abstract
Transparent electrodes overcome the limitations of opaque electrodes by allowing visible light to pass through, which facilitates their application in various fields such as transparent photovoltaics, displays, and smart windows. Particularly, transparent electrodes that are more effective in terms of transmittance are useful and structurally flexible. In this study, an efficient approach is proposed for designing transparent conductive oxides with improved transmittance. The oxide/metal/oxide (OMO) structure exhibits outstanding transparency and electrical conductivity. Therefore, a patterned OMO structure was proposed, in which metal oxides and patterned metal layers are deposited. The improvement in the transmittance and the effective resistance by through the patterned structure applied to the metal layer of the OMO structure was confirmed. Patterning the metal layer enabled the superimposition of light absorption, reflection, and scattering effects, which resulted in enhanced optical transparency while maintaining remarkable electrical conductivity. To confirm the transmittance and electrical conductivity of the patterned OMO structure, two types of patterned structures were designed: stripe and hole. These patterned OMO structures exhibit excellent optical transmittances of 73.94% and 74.51%, showcasing an improvement of over 8% compared with the planar OMO structure. Sheet resistance is also significantly affected via pattern designs, reaching 2.15 Ω/□ of striped- pattern and 2.11 Ω/□ of hole-pattern. This suggests that transparent conductive oxides of metal patterning is highly effective to improve the optical and electrical features to be adopted in transparent photovoltaics, energy utilities, and transparent devices.
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