극자외선 영역에서 곡면 DOEs에 관한 연구
Studies on Curved Diffractive Optical Elements in EUV
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본 연구에서는 여러 형태의 회절광학요소의 field performance를 조사하였다. Zemax 프로그램을 이용하여 다섯 개의 회절광학요소, 즉 투과형 평면 DOE, 투과형 곡면 DOE, 반사형 포물면 DOE, 반사형 평면 DOE, 그리고 반사형 곡면 DOE를 설계하였다. 그리고 이들 회절광학요소에 극자외선 파장인 13 ㎚와 가시광선 파장인 632.8 ㎚를 적용시켰다. 이들 DOEs에 사입사 조명시의 회절 한계 하에서의 시야각의 크기 및 파장에 따른 특성, 그리고 주된 수차의 형태를 상호분석 비교하였다. 회절한계 하에서 투과 및 반사 형태 모두에서 곡면 DOEs의 시야각이 평면 DOEs의 시야각보다 훨씬 크다는 것을 알 수 있었다. 또한 사입사 경우에 평면 DOEs와 포물면경의 주된 수차는 코마이며, 곡면 DOEs의 주된 수차는 비점수차와 상면만곡의 혼합된 형태로 나타남을 알 수 있었다. 측정을 통하여 얻은 시야각의 크기와 수차의 종류가 이론적인 결과와 잘 일치함을 알 수 있었다. 또한 극자외선영역에서 평면형 DOEs에 비해 곡면형 DOEs의 field angle의 증가율이 가시광선에서보다 더 효과적임을 알 수 있었다.
Abstract
Field performance of several different types of diffractive optical elements(DOEs) has been carried out. Using Zemax model, we have designed five different types of DOEs, such as transmissive flat-DOE, transmissive curved-DOE, reflective flat-DOE, reflective curved-DOE and parabolic mirror. We have applied two different wavelengths, i.e., 13 ㎚(EUV) and 632.8 ㎚(visible) to above DOEs. Off_axis dominate aberrations and the diffraction limiting (Rayleigh limit) field angles have been investigated and compared at both wavelengths for each DOE. At diffraction limit, field angle of curved-DOEs was much greater than that of flat-DOEs for both transmission and reflective types. We also showed that dominated off-axis aberration of flat-DOEs was coma, but that of curved-DOEs was mixture of astigmatism and curvature of field. The measured field angle and expected OPD aberrations were well coincided with theoretical ones. Increasing the ratio of field angle with wavelength was more effective in curved-DOEs than flat-DOEs.
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