디지털 홀로그래피 현미경과 위상 펼침을 이용한 3차원 측정
3-Dimensional Measurement using Digital Holographic Microscope and Phase Unwrapping
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초록
마이크로미터 이하 물체의 2차원 및 영상과 3차원 영상을 동시에 측정하기 위하여 off-axis 투과형 디지털 홀로그래피 현미경을 구성하였다. 그리고 3차원 영상을 얻기 위하여 Mask-Cut 위상 펼침 알고리즘을 사용하였다. 측정 결과 2차원 상에는 0.8 ㎛ 이하의 문양도 측정할 수 있음을 확인하였다. 그리고 마이크로미터 이하 물체의 2차원 영상과 3차원 영상을 동시에 측정 할 수 있음을 확인하였다.
Abstract
We have reconstructed 3-dimensional images by using the digital holographic microscope and the Mask-cut phase unwrapping algorithm. Off-axis holograms recorded with a magnified image of the microscopic object lens and reference beam are numerically reconstructed in amplitude and phase image by the Fresnel diffraction approximation. We have simultaneously reconstructed 2-dimensional and 3-dimensional images of the sub-micrometer objects.
참고문헌 (15)
- "Digital image formation from electronically detected holograms", 11, pp.77~79 (1967)
- "Reconstruction of jplogram with a computer", 17, pp.434~444 (1972)
- "Investigation of-micro-opto-electro-mechanical components with a holographic microscopic interferometer", 3396, pp.238~243 (1998)
- "Studies of digital microscopic with application to microstructure testing", 40, pp.5046~5051 (2001)
- "Recording of larger object by using two confocal lenses in digital holography", 14, pp.244~248 (2003)
- "Direct phase determination in hologram interferometry with use of digitally recorded holograms", a 11, pp.2011~2015 (1994)
- "Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology", 38, pp.4812~4820 (1999)
- "Fast numerical reconstruction technique for high resolution hybrid holographic microscopy", 38, pp.2204~2055 (1999)
- "Properties of digital holography based on in-line configuration", 39, pp.3214~3219 (1999)
- "Noise-immune phase unwrapping algorithm", 28, pp.3268~3270 (1989)
- "Two-dimensional phase unwrapping with minimum weighted discontinuity", A14, pp.2692~2701 (1997)
- "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms", 38, pp.6994~7001 (1999)
- "Digital Holography", pp.21~26 (2005), Springer
- "Analysis of the phase unwrapping problem", 21, pp.2470~2474 (1982)
- "Two-Dimensional Phase Unwrapping", pp.136~151 (1998), John Wiley & Sons