편광 간섭을 이용한 광도파로 기반의 표면 굴절률 센서
Polymer Waveguide Based Refractive Index Sensor Using Polarimetric Interference
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초록
본 논문에서는 폴리머 광도파로 상부에 TiO2(Titanium dioxide)박막이 증착된 굴절률 센서를 구현하였다. 제작된 센서를 이용하여 글리세롤의 굴절률 변화에 따른 출력광의 편광 간섭 변화를 측정하였다.또한 박막 두께에 따른 편광 간섭의 민감도 변화를 확인하고, 수치해석 결과와 비교하였다.특히TiO2가 20 nm 증착된 광도파로에서 2π의 위상차를 갖는 굴절률 변화는 1.8×10-3이다.
Abstract
A novel refractive index sensor, which consists of polymer channel waveguide overlaid with TiO2 thin film, is demonstrated. To evaluate the fabricated sensor, we measured the polarimetric interference induced by concentration change of injected glycerol solution. Our experimental results show that thicker TiO2 film improves the sensitivity of the polarimetric interferometer. For the fabricated waveguide with a 20 nm thick TiO2 film, the measured index change to lead phase variation of 2π is 1.8×10-3.
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