패턴 빔을 이용한 BGA 단차 측정
BGA Height Measurement Using Pattern Beam
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조회
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참고문헌
키워드
초록
본 연구에서는 패턴 빔을 이용하여 표면이 거친 물체의 단차를 비접촉 방식으로 측정 하는 방법에 대하여 연구하였다. 본 연구 에 사용된 방법은 장치가 매우 간단하고 스페클 노이지가 영상에 미치는 영향이 작아 재현성 면에서 매우 우수하였다. 특히 기준 면에 문양이 없는 경우에는 기존의 자동 초점 측정 장치로는 측정하기 어려우나, 본 연구 방법에 의해 측정이 가능함을 보였다. 그리고 측정 시간이 매우 짧고 재현성이 좋으며 장치가 간단하여 산업 현장에서 응용하기 적절한 방법이다.
Abstract
We describe a simple method to obtain an optical sectioning in a conventional wide-field microscope by projecting a single spatial frequency grid pattern onto the object. Using a patterned beam, we have measured the height of BGA with a rough surface that provide the coherence noise. The configuration of the height measurement system using pattern beam is simple. The image acquired by this system is not depend on the coherence noises. This system is also applicable to the sample reference plan that has no pattern on ground. The reappearance and accuracy are outstanding and applicable to many industrial optical metrology.
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