나노구조 기반 초박형 적외선 차단 필터
An Ultra-thin IR Cut-off Filter Based on Nanostructures
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본 연구에서는 나노패턴된 금속(Ag)-유전체(PDMS) 다층 기반의 쌍곡선 메타구조를 제안하고 영상 소자용 적외선 차단 필터의 성능에 대해보고한다. 사각형 모양의 Ag 나노 패턴의 크기와 Ag 나노 패턴을 둘러싼 PDMS의 두께를 최적화함으로써, 제안된 IR 차단 필터가 0.70–1.01μm 파장 대역의 빛을 99% 차단하면서도 가시광 영역에서 94% 이상의 높은 투과율을 나타냄을 보였다. 차단 파장 대역은 쌍곡선 메타구조의 epsilon-near-zero (ENZ) 파장보다 긴 파장 영역에서 시작하여 Ag 나노 패턴에 의한 플라즈모닉 흡수가 강한 지점에서 끝나게 된다. 근적외선 차단 대역보다 긴 파장 영역에서는 수평으로 인접한 Ag 나노패턴들 사이의 플라즈모닉 커플링 효과로 다시 투과도가 증가됨을 알 수 있다. 이러한 메타구조체는 적외선 차단 필터의 성능을 향상시킬 수 있을 뿐만 아니라 공정 단순화를 통해 초박형 제조가 가능하여, 다양한 평면 광학 및 집적광학 부품들에 적용될 수 있다.
Abstract
We propose a hyperbolic metastructure based on a nanopatterned metal (Ag)-dielectric (PDMS) multilayer and report on its performance in an infrared (IR) cut-off filter for imaging devices. By optimizing the size of the square-shaped Ag nanopattern and the thickness of PDMS surrounding the Ag nanopattern, the proposed IR cut-off filter blocks 99% of light in the 0.70–1.01 μm wavelength band while maintaining a high transmittance of over 94% in the visible region. Here, the cut-off wavelength band starts at a region above the epsilon-near-zero (ENZ) wavelength of the hyperbolicmetastructure and ends at the point where plasmonic absorption appears strongly. It is observed that transmittance in the wavelength region longerthan the IR cut-off band increases again due to plasmonic coupling among horizontally adjacent Ag nanopatterns. This metastructure can improve the performance of IR-blocking filters as well as allow it to be manufactured ultra-thin, which is applicable to various planar optical elements andintegrated optical components.
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