CPA 시스템 구성을 위한 고효율 투과형 유전체 회절격자 설계
Design of High Efficiency Transmission Dielectric Grating for Chirped Pulse Amplification
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초록
2층의 결합층과 2층의 격자 층으로 구성된 회절격자 구조를 형성하고, 최적화 기법을 통하여 −1차에서 높은 투과 회절 효율을 가지는 회절격 자를 설계하였다. 설계된 회절격자는 설계 중심파장에서 99.997%의 transverse electric wave 회절 효율을 가지고 있었으며, 95% 이상의 회절 효율을 유지하는 파장 폭이 80 nm이고 입사각 폭이 20.0°이었다. 회절격자 공차 분석을 수행하여 95% 이상의 회절 효율을 가지기 위한 두께 공차가 최소 60 nm 이상 확보되어 있고, 내부각도 10° 이내의 사다리꼴 모양에서도 회절 효율을 유지할 수 있음을 확인하였다.
Abstract
A diffraction grating structure composed of two matching layers and two grating layers was formed, and a diffraction grating with high transmission diffraction efficiency in the −1 st order was designed through an optimization technique. The designed diffraction grating had a transverse electric wave diffraction efficiency of 99.997% at the design center wavelength, and had a wavelength width of 80 nm and an incident angle width of 20.0° that maintained a diffraction efficiency of 95% or more. By performing the grating tolerance analysis, it was confirmed that the thickness tolerance to have a diffraction efficiency of 95% or more was secured to at least 60 nm, and the diffraction efficiency could be maintained even in a trapezoidal shape with an internal angle of less than 10°.
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