Preparation of TiO2 thin films by coating-pyrolysis process of Ti-naphthenate

Abstract

TiO2 thin films were prepared by coating and subsequent pyrolysis processes using Titanium-naphthenate as araw material. TiO2 thin films were made by spin-coating technique on the glass substrates, and heat treated at 450oC, Thetransmitance, refractive index, crystalinity and surface morphology of the TiO2 thin films were measured by UV/Vis spec.trophotometer, x-ray difractometer and scanning electron microscope. TiO2 thin films on the slide glass showed the trans.mitance of 70~90 % and refractive index of 2.6 at 420 nm. The results of XRD and SEM showed that the TiO2 thin filmsexhibited the anatase phase and the thread-like surface morphology.Key words TiO2 thin film, Spin coating, Transmitance, Refractive indexTi-naphthenate. .. -.... .. TiO2 ... ...... .... .... .... ........ ..... , .. , 550-749(2001. 5. 4. .. ). . TiO2 ... ........ Titanium-naphthenate. .. -...... ..... . ..... Ti-naphthenate. toluene. ... ... ...... ... slide glass. ..... . Titanium-naphthenate ... spin-coating...... .... 450oC.. ..... TiO2 ... ..... . ... ... ... UV/Vis, XRD . SEM ... ... ... , ... , ... . .. ... ..... . Slide glass .. ... TiO2 ... .... 70~90 % ..420 nm... .... 2.6... . TiO2 ... anatase .. ..... ... ... ... .. ... ..... .1. . .TiO2. . . ... ..... ... .... .