LPE법으로 성장시킨 Zn:LiNbO3/Mg:LiNbO3 단결정 박막의 구조적 특성
Structural properties of Zn : LiNbO3/Mg : LiNbO3 single crystal thin films grown by LPE method
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초록
Li2CO3-V2O5 flux를 사용한 liquid phase epitaxy(LPE) 법을 사용하여 LiNbO3 (001) 기판위에 5mol% ZnO가 첨 가된 LiNbO3 박막과 2mol% MgO가 첨가된 LiNbO3 박막을 성장시켰다. Zn:LiNbO3 막과 Mg:LiNbO3 막과의 결정성과 격자 부정합은 x-ray rocking curve(XRC)로 분석되었다. 그리고 다층 박막의 단면에서의 ZnO와 MgO의 분포가 electron probe micro analyzer(EPMA)를 사용하여 관측되었다.
Abstract
The 5 mol% ZnO doped LiNbO3 film and the 2 mol% MgO doped LiNbO3 film were grown on the LiNbO3 (001) substrate by liquid phase epitaxy (LPE) method with Li2CO3-V2O5 flux system. The crytsallinity and the lattice mismatch between Zn : LiNbO3 film and Mg : LiNbO3 film were analyzed by x-ray rocking curve (XRC). In addition, the ZnO and MgO distribution in the cross-section of the multilayer thin films was observed using electron probe micro analyzer (EPMA).
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